RF Power Supply and Matching Box
2. Overview
10
Classification Item
Specification value
RFS-2750L
Input
Phase, frequency
Three phase, 50/60 Hz
Input voltage
200 V/220 V
Fluctuation range
±
10% (180 to 242 V)
Input capacity
9 kVA or less
Connector
CE05-2A32-17PD-D
Leakage current
5 mA or less
Output
Oscillation frequency
27.12 MHz
±
0.05%
Rated traveling wave
power
5.0 kW (at 50
Ω
load)
Maximum reflected
wave power
500 W
Output impedance
50
Ω
Harmonic distortion
-45 dB or less
Power stability
±
3% or less of rated output (10% to 100% of rated output)
Rise time
Minimum approx. 30 ms
Linearity
±
2% or less of rated output (10% to 100% of rated output)
Output connector
DIN-7/16 connector
Cooling
Cooling method
Water c forced air cooling
Water temperature
5
°
C to 25
°
C (no condensation)
Water volume
7 L/min or higher *Alarm operates at cooling water volume
6.5 L/min or lower
(However, the alarm does not operate when RF-OFF)
Differential pressure
Approx. 0.14 MPa (at 7 L/min)
Withstand pressure
0.96 MPa or less
Joint
PT-3/8
Water quality
See "Table 2-17 RF system cooling water - Water quality"
Exterior
Exterior dimensions
480 W x 600 D x 250 H or less (not including protrusions)
Configuration
Rack mount configuration
Weight
Approx. 54 kg
Table 2-6 RF power supply individual specifications