RF Power Supply and Matching Box
4. Functions
36
4-1-7.
RF power supply parameters
How to start the configuration menu
On the operation mode selection screen, simultaneously press the "ESC" key and "ENT" key for 3
seconds or more to open the configuration menu.
(Operation mode selection screen)
(Configuration menu)
You can select the item to change by pressing the up and down keys on the configuration menu screen.
(The selected item has the "*" symbol.)
You can change the parameter by pushing the "ENT" key on the selected item.
Return to the parent menu by pressing the "ESC" key.
Return to the operation mode selection screen by pressing the "ESC" key on the configuration menu
screen.
Item
Default value
Comments
METER CALIBRATION
Do not execute Power calibration menu
After selecting <EXECUTE> and setting calibration power, power calibration is
available with the up/down keys.
(Within 5% of rated power)
Selecting <DEFAULT> returns the value to the factory default.
START PULSE
Do not execute Not configurable
SOFT START
SOFT START TIME SET (RISE) 0.0 (s)
Soft start time. Set the rise time until the rated power.
When the power setting is low, rises in a shorter time than the set value.
SOFT START TIME SET (FALL) 0.0 (s)
The power down time setting when reducing power during RF ON.
The time from the rated power until 0 W.
ARCING
ARCING COUNT SET
0 CNT ※1
Sets RF OFF as an ALARM when the set number of arcs is detected.
If 0 CNT, does not set RF OFF. (Also does not send ALARM)
RESTART TIME SET
10 ms ※2
Internal arcing shut off pause time
RECOVER SOFT START
0.0 (s)
Soft start after internal arcing pause time
RECOGNIZE CONT (FAST-ARC) 0 CNT
High-speed arcing signal count when the high-speed arcing signal makes the
transition to internal arcing shut off
If 0 CNT, does not transition to internal arcing
SIGNAL MASK TIME SET
0.0 (s)
The ARC external signal is not sent during the period of set time from RF ON.
SIGNAL MASK TIME SET
(DELAY)
0.0 (s)
During RF ON, the ARC signal is not sent within the set time.
SIGNAL OUTPUT TIME (DELAY) 0.0 (s)
The set time delay when sending the ARC signal.
If RF OFF when time to send the signal, the signal is not sent.
EXTERNAL ARCING
SINGLE
Cannot change setting
OVER
VPP
PROTECTION
SHUT DOWN TIME SET
0.0 (s)
Shut off when excessive VPP droop control continues for the set time.
LIMIT MASKTIME SET
0.0 (s)
Do not droop during the set time even for excessive VPP.
OVER
REF
PROTECTION
SHUT DOWN TIME SET
0.0 (s)
Shut off when excessive reflected wave droop control continues for the set time.
SIGNAL MASKTIME SET
0.0 (s)
The REF signal is not sent during the period of set time from RF ON.
SIGNAL
MASKTIME
SET
(DELAY)
0.0 (s)
During RF ON, the REF signal is not sent within the set time.
TARGET LIFE INITIAL
Do not execute RF output cumulative power initialization
Select 0 [kW/h] to initialize.
ANALOG
MODE
SELECT
PORT
SELECT
EXT(1,2,3)
○○○
NORMAL
FWD[1]
Operation mode during analog control. Do not select a parameter other than NORMAL
FWD [1].
●○○
NO OPERATION Not changeable
○●○
NO OPERATION Not changeable
●●○
NO OPERATION Not changeable
...
...
...
●●●
NO OPERATION Not changeable
ANALOG CONT ADJUST
Do not execute Calibration menu for the external command signal.
MONITOR ADJUST
Do not execute Calibration menu for the external monitor signal.
COMMUNICATION ID
0
Not used
PATTERN SET
Do not execute Not used
OSC SETTING
OSC SOURCE SELECT
INTERNAL
External oscillator usage setting.
INTERNAL or EXTERNAL.
Table 4-6 RF power supply parameters
RF OPERATION SELECT
<PANEL> SERIAL ANALG
* METER CALIBRATION
START PULSE
