RF Power Supply and Matching Box
Introduction
Introduction
Thank you for purchasing this ULVAC system.
This instruction manual is intended to serve as a guide for the safe and efficient use of the system. It contains
important information such as safety precautions and the operating, inspecting, and maintenance procedures
required to use the system. Carefully read this manual and fully understand its contents to prevent serious
accidents before they happen.
Before using the system, carefully read this manual and fully understand the operating, inspecting
and maintaining procedures.
Do not operate the system before you fully understand the explanations in this manual.
Keep reading this manual until you fully understand the system and can operate it correctly.
System safety is explained in "Safety precautions" (page ii), "Safety symbols" (page iii), and
"1. For Safe Operation" (page 1). Carefully read and understand these sections before using
the system.
Carefully store this manual nearby so it can be used at anytime.
When the system's installation location is changed, always include this manual with the
system.
The content of this manual may differ from the system being used due to system
improvements.
If you have any questions and items of concern, contact your ULVAC
’
s dealer.
Please operate the system safely and administer it correctly.
The content listed in this manual is subject to change without prior notice because of changes in
system specifications or system improvements.
The copyright of this manual and safety guide is held by the ULVAC Inc.
You are forbidden from copying all or a portion of this manual without the consent of the
ULVAC Inc.
You are forbidden from using this instruction manual for systems or applications other than
those approved by the ULVAC Inc.
You may not copy any portion of this instruction manual for use by a third party without the
consent of ULVAC Inc.