RF Power Supply and Matching Box
6. Maintenance
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6. Maintenance
The chapter describes necessary maintenance so the system can be used for years to come.
If you neglect maintenance, the system will wear down more quickly which may cause it to stop working.
Please read this chapter carefully and perform maintenance.
6-1. RF power supply maintenance and inspection
RF power supply maintenance and inspection is described below. About once every six months, remove
the RF power supply's cooling water tubes and inspect the connectors for corrosion and cloging. Never
open the cover when energized.
The parts required for the RF power supply's periodic maintenance are listed below.
No.
Part name
Periodic maintenance -
Recommended replacement
period
Comments
1
Cooling fan
4 to 5 years
2
Electrolytic
capacitor
4 to 5 years
3
DC/DC converter 4 to 5 years
4
Switching power
supply
4 to 5 years
Power supply for internal device control
5
Fuse
4 to 5 years
6
Flow meter
4 to 5 years
7
Cooling plate
5 to 7 years
The cooling plate may clog because of
the water quality.
(Basically, handle by internal
cleaning)
Note: The recommended replacement period is not a guarantee of a product's lifespan. The rate of
consumption of these products may also greatly differ according to the frequency of system usage.
Note: In order to use this system for many years to come, please ask ULVAC to periodically overhaul the
system using the above table as a reference.
Warning
When performing maintenance, always shut off the primary-side breaker of the power supply
used and pull the plug from the input socket before working. Also wait for three minutes or
more after shutting off the breaker.
Table 6-1 RF power supply recommended replacement parts
