Ulvac RFS-1305L, Instruction Manual, Page: 41 / 93

RF Power Supply and Matching Box 4. Functions
33
Connector name Pin number Signal name Comments Input/
output
INTERFACE
(D-sub 25 female)
1-14 External interlock Close to release the interlock Input
2-15 RESET Close to input reset Input
3-16 RF ON command Close for RF ON Input
4-17 RF ON answer Close with RF ON Output
5-18 ALARM Close with ALARM occurrence, clear with
reset Output
6-19 ARC Close when arcing occurs Output
7-20 POWER SET Traveling wave power setting input Input
0 W to rated power/0 V to 10 V
8-21 Pf monitor Traveling wave power monitor output Output
0 V to 10 V/0 W to rated power
9-22 Pr monitor Reflected wave power monitor output Output
0 V to 10 V/0 V to rated reflected power
10-23 VDC monitor VDC monitor output Output
0 V to 10 V/0 V to rated VDC
11-24 VPP monitor VPP monitor output Output
0 V to 10 V/0 V to rated VPP
12-25 Interlock Response When you release MB-FAIL,INTERLOCK
CLOSE
12, 13 RESERVE System reserved -
OSC BNC
connector External oscillator
input 13.56 MHz
±
0.05%
27.12 MHz
±
0.05%
Input
13 dBm
±
3 dB
※ INTERFACE connector pins 20, 21, 22, 23, 24and 25 are GND
※ Input the external oscillator input with an accuracy of 13.56 MHz
±
0.05% for 13 MHz power supplies,
27.12 MHz
±
0.05% for 27 MHz power supplies. If the frequency is different, the power supply may be
damaged.
The following RF power systems do not have a VDC detection function, so please leave PIN10-23 of
the INTERFACE connector open.
・RFS-2750L/MBX-2750L
・RFS-2775L/MBX-2775L（VDC detection function can be added as an option）
・RFS-1330L/MBX-1330Lµ
Caution
Table 4-5 RF power supply INTERFACE pin assignments