RF Power Supply and Matching Box
2. Overview
12
Classification
Item
Specification value
Protective
functions
FWD
Pf overpower
Controls Pf power
RF droop
REF
Pr overpower
Controls Pf power
RF droop
OC
RF amplifier overcurrent
Controls Pf power
RF droop
OV
RF amplifier overvoltage
Controls Pf power
RF droop
Vpp
When Vpp voltage exceeds rated
voltage
Drops Pf power
RF droop
ARC
When micro arcing has occurred After shutting off Pf power and
pausing 10 ms, automatic recovery
by soft start.
RF shut off
INTLOCK When the external interlock has
operated
Stops RF output
Recovers to the standby state if
cleared
RF
–
OFF
ALARM
Overheat, fan air volume decrease,
cooling water volume decrease, RF
amplifier output unbalanced, cover
open, main fuse blown, DC portion
malfunction
Stops RF output
RF
–
OFF
Operation mode
Controllable by the operation panel and external command signal
Insulation resistance
50 M
Ω
or more with a 500 VDC insulation tester (between AC LINE
and CASE)
Withstand voltage
1500 V/1 min at 50/60 Hz (between AC LINE and CASE)
Ambient temperature
during operation
5
°
C to 40
°
C
Ambient humidity during
operation
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, vibration
Not containing corrosive gas
Table 2-8
RF power supply common specifications