Ulvac RFS-1305L, Instruction Manual

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RF Power Supply and Matching Box
75
Figure 8-8 RFS-2775L exterinal view
I N T E R F A C E
O S C I N MB -S I G
MAIN
27MHz 7.5kW RF GENERATOR RFS -2775L
RS -232 C
55 kg
NP
G N D
I N P U T
I N L E T O U T L E T
R F O U T
O
U
T
L
E
T
3
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8
IN
P
U
T
G
N
D
M
B
-S
IG
N
A
L
O
S
C
IN
IN
T
E
R
F
A
C
E
R
F
O
U
T
IN
L
E
T
3
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8