RF Power Supply and Matching Box
7. Troubleshooting
65
7. Troubleshooting
This chapter explains corrective action when problems occur.
7-1. Troubleshooting
If a problem occurs, make an initial diagnosis with Table 7-1 and Table 7-2.
7-1-1. Troubleshooting related to the RF power supply
No.
Problem status
Cause and action
1 The screen does not appear even
when turning on the breaker.
The required voltage is not applied.
2 ALARM [DC SOURCE FAIL] is
displayed when the breaker is turned
on.
If the three-phase 200 V phase order (R,S,T) differs, the
three-phase PFC module cannot operate and
the alarm sounds. Check the phase order.
If the problem is not solved with the above, possible internal
component damage. Contact ULVAC.
3 Operation panel indicates
"INTERLOCK", RF cannot be turned
on.
External control connector (INTERFACE) pins 1-14 are not
jumpered (shorted).
The interlock on the matching box output side panel is not
released. Refer to item 3-3 in the matching box installation
and ensure the output surface panel is firmly making contact.
For the interlock when the cover is open, press the control
panel's off button or close external control connector
(INTERFACE) pins 2-15 to clear.
4 INTERLOCK/ALARM is not displayed
on the operation panel but RF cannot
be turned on.
RF ON/OFF is set to external control.
Failure of internal board. The part must be replaced. Contact
ULVAC.
5 "RF ON" LED is on but no output.
(Absolutely no output.)
External command voltage is not supplied in remote operation.
The output setting on the operation panel is set to 0 (W).
OSC INT/EXT selection is set to EXT.
6 "RF ON" LED is on but no output.
(Not achieving rated value.)
Faulty transistor in the RF power supply.
For external control, 0 to 10 V is not input or has decreased.
Matching not achieved or load is not discharging.
Table 7-1 RF power supply troubleshooting list