RF Power Supply and Matching Box
5. Operation
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5-2-3. Remote operation method (external preset operation)
1) Operation mode menu
* The external
control terminal (PRESET) function is
an AMC-9L only function.
To change the operation mode, press the "ESC" key several times to display the configuration
screen, then select operation mode <PR
·
RC> with the left and right keys and press the "ENT"
key.
(
AMC-9L/AMC-9LT
operation mode selection screen)
2)
Automatic matching operation
Switch between automatic and manual with the automatic matching controller's AMC.EXT
connector.
Select automatic mode by opening AMC.EXT pins 1-9 on the automatic matching controller.
Automatic matching starts with RF ON.
For the AMC.EXT and PRESETconnectors' pin assignments, see Figure 4-7 and 4-8.
The positions of the variable capacitors cannot be changed by external command voltage in
PR
·
RC mode.
Figure 5-2 Timing chart during external analog recall operation
RF
ON/OFF
ON
OFF
AMC
MANU/AUTO
MANU
AUTO
TUNE/MATCH
ANALOG PRESET
０
９９
TUNE/MATCH
POSITION
０
９９
AMC CONTROL SELECT
PANEL
<PR・RC> ANALOG
