RF Power Supply and Matching Box
6. Maintenance
63
6-2. Matching box maintenance and inspection
The matching box inspection should be performed about once every six months and cover the items listed
below.
Is water leaking from the water-cooled coil?
Look at the water-cooled coil connector. Is the inside of the pipe clogged?
Has the tip of the water-cooled coil connector disappeared?
Has dust accumulated inside the matching box?
The matching box contains the kinds of consumable parts and parts that require regular maintenance
listed below. In order to use the system for many years to come, we recommend you periodically replace
these parts or overhaul the system.
No.
Part name
Periodic maintenance -
Recommended replacement
period
Comments
1 Cooling fan
4 to 5 years
2 Vacuum variable
capacitor
3 to 4 years
1 million cycles at 50% variability (bellows
lifespan)
4 million cycles at 30% variability
3 Cooling pipe
5 to 7 years
(Basically, handle by internal
cleaning)
The cooling pipe may clog because of the
water quality.
4 Motor
5 to 7 years
5 Potentiometer
3 to 4 years
6 Gear
3 to 4 years
7 Coupling
3 to 4 years
Danger
Never open the power supply's cover when energized. The voltage generated by this power
supply is sufficient enough to pose a danger to human life. If by some chance a person
touches this high voltage current, it will lead to a serious accident.
Never energize the power
supply with the cover removed.
Figure 6-1. Water-cooled coil inspection point
Table 6-2 Matching box recommended replacement parts
Check if the
water inlet tip has
decreased.