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RF Power Supply and Matching Box
5. Operation
57
3) Save external preset
The current MBX TUNE and MATCH positions are saved to the specified PRESET number by closing
PRESET connector pins 1-9.
Figure 5-3 Timing chart during external preset (saving)
AUTO/MANUAL switch
(AMC.EXT[1-9])
Open
Close
Open
Close
SELECT1
(SELECT[3-11])
SELECT2
(SELECT[4-12])
SELECT3
(SELECT[5-13])
SELECT4
(SELECT[6-14])
PRESET
(SELECT[1-9])
Close
Open
100 ms or more
50 ms or more