RF Power Supply and Matching Box
3. Setup
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3. Setup
The section describes necessary preparation and precautions before operation of the system.
3-1. Accessories
The following products are included with the RF power supply and automatic matching controller.
Name
Comments
Quantity
1. AC input cable
Three-phase 200 V, 5 m
User terminal untreated (R:S:T=red:white:black)
or (R:S:T:GND=red:white:black:green)
13 MHz 1 kW to 3 kW: 3.5 sq
13 MHz 5 kW:
5.5 sq
13 MHz 10 kW:
14 sq
27 MHz 5 kW:
22 sq
27 MHz 7.5 kW:
22 sq
1 set
When using a single-phase power supply:
supply single-phase 200 V to (R:S=red:white).
2. GND cable
RF power supply GND cable.
User terminal untreated, wire size:
13 MHz 1 kW to 5 kW: 5.5 sq
13 MHz 10 kW:
14 sq
27 MHz 5 kW:
14 sq
27 MHz 7.5 kW:
14 sq
1 set
4. External control connector
D-sub 25 male
1 set
(Connector model: HDBB-25P: Hirose Electric Co. Ltd.)
5. Flow connector contact
* 13 MHz 1 kW, 13 MHz 3 kW, 13 MHz 5 kW only
1 set
Name
Comments
Quantity
1. AC input cable
Single-phase 100 V, 5 m
1 set
User terminal 100 VAC outlet (3-prong with ground)
2. External control connector
D-sub 25 female
1 set
(Connector model: HDBB-25S: Hirose Electric Co. Ltd.)
3. External PRESET connector
(AMC-9L only)
D-sub 15 female
(Connector model: HDAB-15S: Hirose Electric Co. Ltd.)
1 set
Table 3-1 RF power supply accessories
Table 3-2 Matching box accessories