RF Power Supply and Matching Box
2. Overview
13
Classification Item
Specification value
MBX-1305L
MBX-1305Lu
RF input
Frequency
13.56 MHz
±
0.05%
Rated power
50 W to 500 W or lower
Input impedance 50
Ω
RF output
Permissible
output voltage
2.5 kVpp or less (limited by capacitor's withstand current)
2.5 kVdc or less
Permissible
output current
40 A or less
Load impedance Real part: 0.5
Ω
≤
R
≤
10.0
Ω
(However, when within the specified voltage and specified current ranges)
RF output
electrode
Copper plate: t3.0 x 40 (4-M4)
* The area near the output electrode is not cooled.
When it reaches high temperatures, cool it to 120
°
C or less.
Matching
accuracy
Residual
reflected wave
power
A value 0.3% or lower of input traveling wave power or 10 W or less,
whichever is greater.
Cooling
Cooling method Forced air cooling by a ventilation fan
Alarm output
Alarm output as "MB FAIL" on the RF power supply
The following alarms are detected with OR (NORMAL OPEN)
1. Panel open contact (maintenance side)
2. FAN sensor (alarm is also output when the matching controller is off)
3. RF connector plugged-in validation contact
4. Panel open contact (mounting surface)
Ambient temperature during
operation
5
°
C to 40
°
C (However, chamber mounting panel temperature is 60
°
C or
less)
Ambient humidity during
operation
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, vibration
Not containing corrosive gas
Exterior
Exterior
dimensions
375 W x 250 D x 170 H (not including protrusions)
Weight
Approx. 10 kg
* It is specifications of VPP:1000V/VDC:1000V in MBX-1305L-LV.
Table 2-9 Matching box individual specifications