RF Power Supply and Matching Box
3. Setup
23
3-3. Matching box installation
Install the matching box according to the following procedure.
3-3-1.
Matching box installation location
Since all wiring acts as an inductor at the frequency (13 MHz/27 MHz) used by the RF power
supply, decide on an installation location for the matching box where the distance between the load
and the matching box's RF access port is as short as possible. When this wiring is too long, problems
will occur like the generation of abnormally high voltage which will damage parts or automatic
matching not operating properly, so ensure the wiring is the minimum length.
There is also an interlock switch on the output surface panel.
If the interlock switch on the output surface panel is not pressed tightly because the RF access port
is too large, be aware that the interlock will not be released.
3-3-2.
Installation
Mount the matching box on an intermediate box or on the chamber using the matching box taps.
See "
Figure 3-2 Matching box installation
".
3-4. Automatic matching controller installation
※
As much as possible, install in a location with a temperature from 15
°
C to 30
°
C and with little dust and
vibration.
Also avoid installing it in a location where the floor surface is not level.
※
Install it at a distance of 20 cm or more from the back wall.
Figure 3-2 Matching box installation example
Interlock Switch
(Output Surface
Panel)
Chamber or Intermediate Box
Matching Box
RF Access
Port
