RF Power Supply and Matching Box
4. Functions
32
【MB COVER OPEN】
Displayed when the cover is open or the fan stops. After closing the cover,
clear with RESET.
【COVER OPEN/MB-FAIL】
【INTERLOCK】
When the external interlock signal is not input (OPEN)
When the user-side error is cleared, recover with RESET.
【OVER HEAT】
When the internal water cooling fin temperature has risen abnormally
【WATER SHORTAGE】
When the cooling water flow rate has dropped
【EXTERNAL>INTERNAL】
When RF turned on without external oscillator input.
【INTERNAL>EXTERNAL】
【EXT OSC NOT READY】
【DC SOURCE FAIL】
When there is a problem with the DC converter portion.
When the phase sequence (RST) for three-phase input differs.
【OVER REF PROTECT】
When excessive reflected wave power (REF) has continued for a set time
【OVER VPP RROTECT】
When excessive VPP voltage (VPP) has continued for a set time
【ARCING COUNT】
When ARC has exceeded the set number of times
【CONTROL ABORT】
When there is a loss of control caused by abnormal output (droop, no output)
【LIMIT PROTECTION】
When a droop function (FWD, REF, OC, 0V) has continued for the specified
time
However, the time set on the settings screen for REF droop function has
priority.
4-1-5.
External control terminal pin assignments
When performing external control, see "Figure 4-3 RF power supply INTERFACE connector pin
assignments" and use the included connector to connect external control.
Even if the external control
terminal is not used, connect pin 1 and pin 14 (external interlock) with a jumper wire.
Table 4-4 ALARM content details
