RF Power Supply and Matching Box
Introduction
4. If you notice a problem with the system
If you notice a problem with the system, see "Chapter 7. Troubleshooting" and verify the symptoms and
malfunction. In order to avoid losses on both sides due to misunderstandings or misjudgments, and to
quickly perform repairs, please work to ensure the accuracy of the information.
If you have determined there is a malfunction or if you have any questions, contact one of the locations
listed below. When contacting ULVAC, please inform us of the product names, model numbers, serial
numbers, and about the symptoms of the problem in as much detail as possible.
5. Disposal
When disposing of the system, please follow all national and local regulations.
Customers are responsible for expenses related to disposal.
