RF Power Supply and Matching Box
2. Overview
8
Classification Item
Specification value
RFS-1350LH
Input
Phase, frequency
Three phase, 50/60 Hz
Input voltage
200/220 VAC
Fluctuation range
±
10% (180 to 242 V)
Input capacity
8 kVA or less
Connector
N/MS3102A22-22P
Leakage current
5 mA or less
Output
Oscillation frequency 13.56 MHz
±
0.05%
Rated traveling wave
power
5 kW (at 50
Ω
load)
Maximum reflected
wave power
500 W
Output impedance
50
Ω
Harmonic distortion
-45 dB or lower (in continuous mode at rated output)
Power stability
±
3% or less of rated output (10% to 100% of rated output)
Rise time
Minimum approx
. 30 ms
Linearity
±
2% or less of rated output (10% to 100% of rated output)
Output connector
DIN 7/16
Cooling
Cooling method
Water cooling
Water temperature
5
°
C to 25
°
C (no condensation)
Water volume
6 L/min or higher *Alarm operates at cooling water volume
5.5 L/min or lower
(However, the alarm does not operate when RF-OFF)
Differential pressure
Approx. 0.06 MPa (at 6 L/min)
Withstand pressure
0.96 MPa or less
Joint
PT-3/8
Water quality
See "Table 2-17 RF system cooling water - Water quality"
Exterior
Exterior dimensions
240 W x 557 D x 177 H
Configuration
Rack mount configuration
Weight
Approx. 25 kg
Table 2-4 RF power supply individual specifications