RF Power Supply and Matching Box
2. Overview
6
2-4. Specifications
This system consists of an RF power supply, a matching box, and a matching controller.
The specifications for each of these components are listed below.
Classification Item
Specification value
RFS-1305L
Input
Phase, frequency
Single phase, 50/60 Hz
Input voltage
200 V/220 V
Fluctuation range
±
10% (180 to 242 V)
Input capacity
1.2 kVA or less
Connector
MS3102A16-10P
Leakage current
2 mA or less
Output
Oscillation
frequency
13.56 MHz
±
0.05%
Rated
traveling
wave power
500 W (at 50
Ω
load)
Maximum reflected
wave power
100 W
Output impedance
50
Ω
Harmonic distortion
-45 dB or less
Power stability
±
3% or less of rated output (10% to 100% of rated output)
Rise time
Minimum approx. 50 ms
Linearity
±
2% or less of rated output (10% to 100% of rated output)
Output connector
HN connector
Cooling
Cooling method
Forced air cooling (cooling by fan)
Exterior
Exterior dimensions
240 W x 420 D x 150 H or less (not including protrusions)
Configuration
Rack mount configuration
Weight
Approx. 10 kg
Table 2-2 RF power supply individual specifications