RF Power Supply and Matching Box
4. Functions
45
4-2-6. Matching controller parameters
How to start the configuration menu
On the operation mode selection screen, simultaneously press the "ESC" key and "ENT" key for 3
seconds or more to open the configuration menu.
(
AMC-9L/AMC-9LT
operation mode selection screen)
(
AMC-8L/AMC-8LT
operation mode selection screen)
(Configuration menu)
You can select the item to change by pressing the up and down keys on the configuration menu screen.
(The selected item has the "*" symbol.)
You can change the parameter by pushing the "ENT" key on the selected item.
Return to the parent menu by pressing the "ESC" key.
Return to the operation mode selection screen by pressing the "ESC" key on the configuration menu
screen.
Item
Default
value
Meaning
AUTO RECALL
DISABLE Select to implement the auto recall operation (automatic recall operation when RF OFF).
It competes with the ANALOG preset function so normally select DISABLE.
RECALL ACTION
Do not
execute
Execute recall operation. Select recall number.
PRESET
Do not
execute
Execute preset. Select the preset number to save the current positions of the variable
capacitors.
MATCHINGBOX STATUS
The number of turns currently used on the matching box's variable capacitors
RECALL COUNT INIT
Do not
execute
Displays and resets number of recalls.
Initialize with 0 CNT
SYSYEM CONSTANT MATCHING COMPLETE REF LEVEL
12 (LSB)
The reflected wave feedback level to judge matching complete.
When lowered, residual reflections decrease but hunting happens easily.
SPEED TEBLE PROCEED REF LEVEL 40 (LSB)
The reflected wave feedback level to start decelerating the motor's operation speed.
Higher is more stable but matching convergence will take time.
MATCHING DELAY TIME (RF ON)
0.0 (s)
The matching operation is not performed from RF ON for the period of set time.
Enter a numerical value when sudden load changes frequently occur from arcing and
electrical discharge is unstable.
MATCHING DELAY TIME (REF)
0.0 (s)
The matching operation is not performed from the reflected wave occurrence for the period of
set time.
Enter a numerical value when sudden load changes frequently occur from arcing and
electrical discharge is unstable.
OPERATION TIME
Displays cumulative operating time.
VARICON MAINTENANCE
Do not
execute
A function to periodically (temporarily) operate a full stroke of the variable capacitors
SOFTWEAR VERSION
Displays the software version
COMMUNICATION ID
Not used
MONITOR ADJUST
Do not
execute
Calibration menu for the external monitor signal.
* AUTO RECALL
RECALL ACTION
Table 4-11 Automatic matching controller parameters
AMC CONTROL SELECT
<PANEL> PR・RC ANALOG
AMC CONTROL SELECT
<PANEL> ANALOG
