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LLE11ARDA001A/E
6.27 Replacing the Pulse Motor of the Electric Operated
Cover AS (40350-E020)
Replacement part: 40350-E020
1. Remove the electric operated cover AS (40350-
7000).
(See 6.1.8.)
2. Disconnect the connector P802 (J2) on the
printed board (40350-BA08).
3. Turn over the electric operated cover AS
(40350-7000), loosen the timing belt (40350-
M918), unscrew HH4×3 (n=2), and remove
the pulley (40350-M956).
4. Unscrew SB4×8 (n=4) and remove the pulse
motor (40350-E020).
5. Reassemble the parts in reverse order.
* Adjust the tension of the timing belt so that its
tension after the replacement is about the same
as the one before the replacement.
6.28 Replacing the Chuck Motor AS
Replacement part: 40350-5210
1. Open the top cover AS (40350-2000) and
remove the side cover L (40350-M225).
(See the section 5.)
2. Unscrew SB4×10 (n=2) and unclamp the
cables. Disconnect the CN2 connector of the
pulse motor driver (for CHUCK, 40273-
E007).
3. Unscrew CK2×5 (n=2) and SW2 (n=2).
Remove the attachment plate (40350-M585)
together with the sensor AS (40350-CA38).
4. Unscrew SB6×15 (n=2) and remove the chuck
motor AS (40350-5210).
5. Reassemble the parts in reverse order.
5$
**
'
5$
%-
5$
59
%#
Summary of Contents for ME-1000
Page 8: ...1 2 LLE11ARDA001A E...
Page 12: ...3 2 LLE11ARDA001A E...
Page 120: ...7 34 LLE11ARDA001A E...
Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
Page 123: ...8 3 LLE11ARDA001A E...
Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...