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LLE11ARDA001A/E
7.15 Position adjustment of the left measuring AS shading
plate
1. Open the top cover AS (40350-2000).
(See 5.1.)
2. Loosen HH44 so as to turn the the shading
plate (40350-M428) together with the collar
(40350-M440).
3. Establish the Test mode.
(See 7.1.2.)
4. Adjust the position so that the voltage of the
FMU R feeler lift sensor of the shading plate
(40350-M428) is at the higher limit as far as
possible within the rage of 900 ± 50 (see the
step 23 in 7.14) and tighten HH4×4 to fix it.
* Adjust the shading plate to the position where
it shades the sensor when the feeler is lifted
up.
7.16 Position adjustment of the right measuring AS shading
plate
1. Open the top cover AS (40350-2000).
(See 5.1.)
2. Loosen HH4×4 so as to turn the the shading
plate (40350-M424) together with the collar
(40350-M440).
3. Establish the Test mode.
(See 7.1.2.)
4. Adjust the position so that the voltage of the
FMU R feeler lift sensor of the shading plate
(40350-M428) is at the higher limit as far as
possible within the rage of 900 ± 50 (see the
step 23 in 7.14) and tighten HH4×4 to fix it.
* Adjust the shading plate to the position where
it shades the sensor when the feeler is lifted
up.
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Summary of Contents for ME-1000
Page 8: ...1 2 LLE11ARDA001A E...
Page 12: ...3 2 LLE11ARDA001A E...
Page 120: ...7 34 LLE11ARDA001A E...
Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
Page 123: ...8 3 LLE11ARDA001A E...
Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...