
6 - 10
LLE11ARDA001A/E
6.9 Replacing the Lens Measuring AS
6.9.1 Replacing the left lens measuring AS
Replacement part: 40350-4100
1. Open the top cover AS (40350-2000).
(See 5.1.)
2. Remove the electric operated cover AS (40350-
7000).
(See 6.1.8.)
3. Disconnect all the connectors from the left
lens measuring AS (40350-4100).
4. Unscrew SB6×18 (n=3) and remove the left
lens measuring AS (40350-4100).
5. Reassemble the parts in reverse order.
6.9.2 Replacing the right lens measuring AS
Replacement part: 40350-4200
1. Open the top cover AS (40350-2000).
(See 5.1.)
2. Remove the electric operated cover AS (40350-
7000).
(See 6.1.8.)
3. Disconnect all the connectors from the right
lens measuring AS (40350-4200).
4. Remove the water supply pipe running over
the right lens measuring AS.
6. Unscrew SB6×18 (n=3) and remove the right
lens measuring AS (40350-4200).
7. Reassemble the parts in reverse order.
5$
5$
Summary of Contents for ME-1000
Page 8: ...1 2 LLE11ARDA001A E...
Page 12: ...3 2 LLE11ARDA001A E...
Page 120: ...7 34 LLE11ARDA001A E...
Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
Page 123: ...8 3 LLE11ARDA001A E...
Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...