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LLE11ARDA001A/E
4.8.6 The SFB position is not proper.
Perform the calibration of the lens measuring AS
(See 7.3.)
Is the symptom improved?
Replace the lens measuring unit with the new one.
(See 6.9.)
Completion
No
Yes
Is the symptom improved?
Completion
Yes
No
Perform the SFB adjustment.
(See 7.9.)
Is the lens measuring position proper?
(See 7.4.)
Perform the feeler adjustment.
(See 7.4.)
No
Yes
Is the overall size of the lens proper?
Yes
Adjust the size.
No
Enable the measurement after roughing.
Is the symptom improved?
Completion
Yes
No
Summary of Contents for ME-1000
Page 8: ...1 2 LLE11ARDA001A E...
Page 12: ...3 2 LLE11ARDA001A E...
Page 120: ...7 34 LLE11ARDA001A E...
Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
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Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...