4 - 10
LLE11ARDA001A/E
Is the symptom improved?
Replace the BA02 board (40350-BA02) with the new
one.
(See 6.1.2.)
Completion
Yes
No
Is the symptom improved?
Replace the BA01 board (40350-BA01) with the new
one.
(See 6.1.1.)
Completion
Yes
No
No
Does the rotary encoder (40350-E035) of the right lens
measuring AS (40350-4200) break?
Replace the rotary encoder (40350-E035) of the right
lens measuring AS (40350-4200) with the new one.
(See 6.21.2.)
No
Yes
Does the CA14 cable (40350-CA14) break?
Replace the CA14 cable (40350-CA14) with the new
one.
No
Yes
Does the CA12 cable (40350-CA12) break?
Replace the CA12 cable (40350-CA12) with the new
one.
No
Yes
Perform the calibration of the lens measuring unit.
(See 7.3.)
Perform the feeler adjustment.
(See 7.4.)
Is the symptom improved?
Completion
Yes
No
Perform the calibration of the lens measuring unit.
(See 7.3.)
Summary of Contents for ME-1000
Page 8: ...1 2 LLE11ARDA001A E...
Page 12: ...3 2 LLE11ARDA001A E...
Page 120: ...7 34 LLE11ARDA001A E...
Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
Page 123: ...8 3 LLE11ARDA001A E...
Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...