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LLE11ARDA001A/E
7.17 Calibration of the touch panel
1. Turn ON the power while pressing the R/L
button.
2. A cross mark as in the right illustration
appears in the left corner of the display.
Depress the mark with a touch pen for a few
seconds. When the cross mark appears in
turn in the four corners of the display, press
the mark that appears with a touch pen.
3. Press the START button.
7.18 Changing the parameters
1. Remove the rear cover (40350-M222) of the main body.
(See 5.5.)
2. Turn on the power of the main body. (The power of the inverter also turns on.)
3. Press the DATA SET button on the inverter control panel once. The parameter No. indication
display blinks (LED indication in 2 digits).
4. Select the parameter No. to be changed with the
∧∧∧∧∧
and
∨∨∨∨∨
buttons
5. Press the DATA SET button once. The set value (LED indication in 5 digits) blinks.
6. Change the parameter set value with the
∧∧∧∧∧
and
∨∨∨∨∨
buttons
7. Press the DATA SET button once. The set value stops blinking and the parameter No.
blinks. (The set value, which is selected in this step, is saved in the inverter.)
8. Press the MODE button once. The system returns to the stand-by (as in the step 1).
* Reading the hidden parameters
The parameter No. 100 or later are the hidden
parameters. Firstly, press the STOP, DATA
SET,
∧
and
∨
buttons simultaneously while
the inverter is turned on. Follow the steps 3
and 4 to read the hidden parameters. (“.” lights
up in the lower right of the 2 digits LED
indication when the parameter No. 100 or
later. (See the right illustration.)) Changing
procedure of the parameter is the same as the
steps 5 to 8 as above.
㫀㫅㩷㫃㫆㫎㪼㫉㩷㫉㫀㪾㪿㫋
“
䊶
”
Summary of Contents for ME-1000
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Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
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Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...