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LLE11ARDA001A/E
6.6 Replacing the Switching Regulator
Replacement part: 80602-00101
1. Open the top cover AS (40350-2000).
(See 5.1.)
2. Remove the side cover R.
(See 5.3.)
3. Disconnect all the connectors from the
switching regulator (80602-00101).
4. Unscrew PC4×5 (n=4) and remove the
switching regulator (80602-00101).
5. Reassemble the parts in reverse order.
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Summary of Contents for ME-1000
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Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
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Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...