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LLE11ARDA001A/E
6.15 Replacing the Lower Processing Chamber AS
Replacement part: 40350-9100
1. Remove the grooving and drilling AS (40350-
3000).
(See 6.11.)
2. Remove the upper processing chamber AS
(40350-9200).
(See 6.14.)
3. Remove the lens clamp (40370-3200) and lens
adapter (40370-8100).
(See 6.3 and 6.4.)
4. Remove the spindle AS (40350-1400).
(See 6.10.)
5. Fully open the chucking shaft and move the
carriage to the right. Remove the guard R
(40350-M911) and inner guard (40340-
M921).
6. Move the carriage to the left and remove the
guard L (40350-M912) and inner guard
(40340-M921).
7. Disconnect the connector (40350-CA25) of the
water leakage sensor, or remove the P215
(J215) on the printed board (40350-BA02)
and the clamp.
8. Remove the lower processing chamber AS
(40350-9100).
9. Reassemble the parts in reverse order.
Summary of Contents for ME-1000
Page 8: ...1 2 LLE11ARDA001A E...
Page 12: ...3 2 LLE11ARDA001A E...
Page 120: ...7 34 LLE11ARDA001A E...
Page 121: ...8 1 LLE11ARDA001A E 8 SUPPLEMENT 8 1 Wiring Diagram...
Page 122: ...8 2 LLE11ARDA001A E 8 2 Connector Cable...
Page 123: ...8 3 LLE11ARDA001A E...
Page 125: ...8 5 LLE11ARDA001A E 8 4 Labels Top view Processing chamber...
Page 126: ...8 6 LLE11ARDA001A E Rear view or...