Model 4200-SCS User’s Manual
Table of Contents
4200-900-01 Rev. K / February 2017
iii
................................................................................... 3-130
................................................................................. 3-130
Running any Flash Project for the first time
.......................................... 3-133
Running the Flash-NAND, Flash-NOR or Flash-Switch Project
........... 3-133
Running the Program or Erase UTM
.................................................... 3-134
Running the Fast-Program-Erase UTM
................................................ 3-136
.................................................................. 3-137
................................................................. 3-137
Running the ConPin-Pulse or ConPin-DC UTM (Switch projects only)
3-138
................................................................ 3-139
Running a FlashEndurance or FlashDisturb project
............................. 3-146
Running endurance or disturb looping
.................................................. 3-148
................................................................................. 3-149
Explanation of flash UTM parameters
.................................................. 3-151
........................................................................................... 3-153
.................................................................................... 3-154
................................................................ 3-155
How to perform a Charge Trapping test
...................................................... 3-156
Slow single pulse charge trapping high K gate stack
........................... 3-156
................................................................... 3-157
How to Control Other Instruments with the Model 4200-SCS
......... 4-1
How to control external equipment
.................................................................. 4-2
Controlling external equipment overview
.................................................. 4-2
Keithley Configuration Utility (KCON)
............................................................. 4-5
How to control a switch matrix
........................................................................ 4-7
.............................................................................................. 4-9
Open KITE and the ivswitch project
........................................................ 4-11
......................................................................... 4-12
..................................................................................... 4-14
How to control a probe station
...................................................................... 4-15
.......................................................................... 4-16
......................................................................... 4-18
............................................................................................ 4-19
..................................................................... 4-21
Open the probesubsites project
.............................................................. 4-21
................................................................ 4-22
..................................................................................... 4-22
..................................................................... 4-25
................................................................................................. 4-26
Running individual plans or tests
............................................................ 4-27
How to control an external pulse generator
.................................................. 4-27
......................................................................... 4-28
............................................................................................ 4-28
.................................................................... 4-31
................................................................................. 4-32
......................................................................................... 4-32
........................................................................................ 4-34
......................................................................... 4-35
How to control an external CV analyzer
........................................................ 4-37
............................................................................................ 4-38
............................................................................................ 4-38
............................................................................... 4-39
.................................................................................. 4-40
................................................................................... 4-41
.............................................................................................. 4-42
................................................................... 4-43
................................................................................... 4-43
What if my equipment is not listed in KCON
................................................. 4-44
............................................................... 5-1
............................................................................. 5-2
.................................................................................................. 5-3
....................................................................... 5-4
......................................................................... 5-6
Summary of Contents for 4200-SCS
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