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4200-900-01 Rev. K / February 2017
Section 4: How to Control Other Instruments with the Model 4200-SCS
Model 4200-SCS User Manual
Section 4
How to Control Other Instruments
How to control external equipment
To complete the tutorials in this section and obtain data that functionally correlates with the sample
data and projects provided, you will need the following equipment:
• 1 - Keithley 4200-SCS with a total of three SMUs (preamps not required)
• 1 - Keithley Model 590 CV Analyzer
• 1 - Hewlett Packard 8110A/81110A Pulse Generator
• 1 - Keithley Model 707 or 708 Switch Matrix
• 1 - Keithley Model 7072 or 7174 8
×
12 matrix card
• 1 - Keithley Model 8006 Component Test Fixture
• 1 - Probe station (manual or supported semi-automatic) and a wafer containing test devices
(MOS capacitor, N-channel MOSFET, and NPN bi-polar transistor)
• 2 - Keithley Model 4801 BNC cables
• 1 - Keithley Model 7078-TRX-BNC adapter
• 1 - Keithley Model 8007-GND-3 cable
• 4 - Keithley Model 4200-MTRX-X cables (0 if using preamps)
• 8 - Keithley Model 4200-TRX-X cables (11 if using preamps)
• 2 - Keithley Model 7007 GPIB cables
• 1 - Keithley Model 236-ILC-3 safety interlock cable
Controlling external equipment overview
The Keithley Instruments Model 4200 Semiconductor Characterization System (SCS) can control
any external instrument or component connected to any of the following communication interfaces:
• IEEE-488 (GPIB) bus
• RS-232 (COM1) port
• Ethernet
1
When an external instrument is added to the system configuration, it is grouped into one of the
following categories:
• Switch matrix
• Capacitance meter
• Pulse generator
• Probe station or test fixture
• General-purpose test instrument
shows the relationship between internal and external instrumentation and illustrates
each instrument category. For more information about relationships between internal and external
instrumentation, refer to the
Reference Manual, Keithley CONfiguration Utility (KCON), page 7-1
.
1. See the
Reference Manual, KXCI Ethernet client driver, page 9-108
to learn how to enable ethernet control of
external instruments.
Summary of Contents for 4200-SCS
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