Keithley 4200-SCS, User Manual

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Table of Contents Model 4200-SCS User’s Manual
ii 4200-900-01 Rev. K / February 2017
Project navigator check boxes ................................................................ 2-21
Executing an individual test .................................................................... 2-23
How to display and manage test results ....................................................... 2-24
Data file management ............................................................................. 2-24
How to manage numeric test results in Sheet tab .................................. 2-32
How to manage graphical test results in the Graph tab .......................... 2-38
KITE library management ............................................................................. 2-45
Submitting devices, ITMs, and UTMs to libraries ................................... 2-45
Submitting tests to a library .................................................................... 2-48
3 Common Device Characterization Tests
.............................................. 3-1
How to perform an I-V test on my device ........................................................ 3-4
Default project overview ........................................................................... 3-4
How to perform a C-V test on my device ...................................................... 3-13
KITE ITM configuration ........................................................................... 3-13
Definition tab ........................................................................................... 3-13
Forcing functions and measure options .................................................. 3-16
Selecting the forcing function ................................................................. 3-16
CVU ITM examples ................................................................................ 3-21
CVU Voltage Sweep ............................................................................... 3-22
CVU Voltage List Sweep ......................................................................... 3-23
CVU Frequency Sweep (bias) ................................................................ 3-24
CVU Frequency Sweep (step) ................................................................ 3-26
How to perform a Pulsed I-V test on my device ............................................ 3-27
Introduction (PIV-A and PIV-Q) ............................................................... 3-27
Pulse IV for CMOS: 4200-PIV-A ............................................................. 3-29
4200-PIV-A test connections .................................................................. 3-30
Using the PulseIV-Complete project for the first time ............................. 3-38
Pulse IV UTM descriptions ..................................................................... 3-49
cal_pulseiv .............................................................................................. 3-50
vdsid_pulseiv .......................................................................................... 3-51
VdId_Pulse_DC_Family_pulseiv ............................................................ 3-53
vgsid_pulseiv .......................................................................................... 3-57
VgId_DC_Pulse_pulseiv ......................................................................... 3-59
scopeshot_cal_pulseiv ........................................................................... 3-63
scopeshot_pulseiv .................................................................................. 3-64
vdsid_pulseiv_demo ............................................................................... 3-66
vgsid_pulseiv_demo ............................................................................... 3-66
scopeshot_pulseiv_demo ....................................................................... 3-66
How to perform a Quiescent-point Pulsed I-V test (PIV-Q) on my device ..... 3-66
Q-Point Pulse IV – Model 4200-PIV-Q ................................................... 3-66
What is the PIV-Q package ..................................................................... 3-67
How to perform reliability (stress-measure) tests on my device .................... 3-68
Connecting devices for stress / measure cycling .................................... 3-68
Overview of the cycling-related tabs ....................................................... 3-69
Configuring subsite cycling ..................................................................... 3-69
Configuring device stress properties ...................................................... 3-74
How to perform AC stress for wafer level reliability (WLR) ........................... 3-78
Segment Stress / Measure Mode ........................................................... 3-85
Segment ARB stressing ......................................................................... 3-86
Segment Stress / Measure Mode configuration ...................................... 3-87
Executing subsite cycling ....................................................................... 3-91
Subsite cycling data sheets .................................................................... 3-91
Subsite cycling graphs ............................................................................ 3-96
Configuration sequence for subsite cycling ............................................ 3-98
How to perform a flash memory test on my device ..................................... 3-100
Introduction ........................................................................................... 3-100
Theory of operation .............................................................................. 3-100
Flash connections ................................................................................. 3-115
Direct connection to single DUT ........................................................... 3-120
Direct connection to array DUT for disturb testing ................................ 3-121
Switch matrix connection to array DUT ................................................ 3-122
Memory projects ................................................................................... 3-124
NVM_examples .................................................................................... 3-126
Flash-NAND tests ................................................................................. 3-126