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Table of Contents

Model 4200-SCS User’s Manual

4200-900-01 Rev. K / February 2017

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Summary of Contents for 4200-SCS

Page 1: ...User Manual 4200 900 01 Rev K February 2017 P4200 900 01K 4200 900 01K www tek com keithley Model 4200 SCS Semiconductor Characterization System...

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Page 3: ...hotocopy or use of the information herein in whole or in part without the prior written approval of Keithley Instruments is strictly prohibited All Keithley Instruments product names are trademarks or...

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Page 5: ...r voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category I sources unless otherwise marked or described in the...

Page 6: ...and local laws The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the...

Page 7: ...d unit terminals and connectors 1 34 Connecting DUTs 1 36 Test fixtures 1 36 Probers 1 37 Advanced connections 1 37 How to run a basic test 1 38 Boot the system and log in 1 38 Open KITE 1 38 Locate a...

Page 8: ...se IV UTM descriptions 3 49 cal_pulseiv 3 50 vdsid_pulseiv 3 51 VdId_Pulse_DC_Family_pulseiv 3 53 vgsid_pulseiv 3 57 VgId_DC_Pulse_pulseiv 3 59 scopeshot_cal_pulseiv 3 63 scopeshot_pulseiv 3 64 vdsid_...

Page 9: ...rolling external equipment overview 4 2 Keithley Configuration Utility KCON 4 5 How to control a switch matrix 4 7 KCON setup 4 9 Open KITE and the ivswitch project 4 11 Running test sequences 4 12 Th...

Page 10: ...Table of Contents Model 4200 SCS User s Manual iv 4200 900 01 Rev K February 2017 Custom file arb waveforms full arb 5 8 Index I 1...

Page 11: ...10 Connecting a LAN 1 10 Model 4200 SCS Hardware Overview 1 11 DC source measure unit SMU 1 13 Models 4200 SMU and 4210 SMU overview 1 13 Basic characteristics 1 13 Basic SMU circuit configuration 1...

Page 12: ...1 36 Basic circuit configurations 1 37 Ground unit connections 1 37 Ground unit DUT connections 1 38 Ground unit terminals and connectors 1 39 FORCE terminal 1 39 SENSE terminal 1 39 COMMON terminal 1...

Page 13: ...s that are supplied with the pulse generator scope and pulse application packages Line cord Miniature triaxial cables two per 4200 SMU or 4210 SMU 2 m 6 ft These are not included when the SMU is order...

Page 14: ...e at the back of the mainframe to assure sufficient airflow CAUTION To prevent damaging temperatures and other harmful environmental conditions that could degrade specified performance follow these pr...

Page 15: ...frequency of 50 Hz or 60 Hz Line voltage is automatically sensed but line frequency is not For more information see the Reference Manual Line frequency setting page 2 16 Check to ensure the operating...

Page 16: ...etting using the KCON utility See the Reference Manual Keithley CONfiguration Utility KCON page 7 1 for details NOTE Operating the 4200 SCS with the wrong line frequency setting may result in noisy re...

Page 17: ...mouse into any of the four 4200 SCS USB ports Figure 1 3 Keyboard connections Connecting GPIB instruments The 4200 SCS can control one or more external instruments by way of the IEEE 488 General Purpo...

Page 18: ...CP2HR Trigger In CVU HCUR LPOT HPOT LCUR K E I T H L E Y INSTRUMENTS SLOT 8 SLOT 7 SLOT 6 SLOT 5 SLOT 4 SLOT 3 SLOT 2 SLOT 1 4200 KEITHLEY 4200 KEITHLEY 4210 KEITHLEY 4210 KEITHLEY KEITHLEY KEITHLEY 4...

Page 19: ...d for each of the two LAN ports Figure 1 7 LAN connections LAN Junction Box or Hub CAT 5 UTP Cable LAN Connectors Model 4200 SCS INSTRUMENT CONNECTIONS SMU ONLY SMU AND GNDU GNDU COM 1 LPT 1 S E N S E...

Page 20: ...nting methods Ground unit GNDU Provides basic information about using the ground unit including basic characteristics and connectors Models 4200 SMU and 4210 SMU overview The following paragraphs disc...

Page 21: ...c SMU source measure configuration FORCE SENSE COMMON V Source I Source 4200 SMU or 4210 SMU 4200 SMU or 4210 SMU I Measure V I Source Control I Limit Compliance V Limit Compliance GUARD 100k 100k Aut...

Page 22: ...p terminals should be considered hazardous even if the outputs are programmed to be low voltage Precautions must be taken to prevent a shock hazard by surrounding the test device and any unprotected l...

Page 23: ...Nominal internal auto sense resistance appears between SENSE LO GUARD and COMMON NOTE The remote sense capability of the ground unit should be used instead of the SENSE LO of a SMU If you need to use...

Page 24: ...ed below For additional information about making preamp signal connections refer to the Reference Manual Basic source measure connections page 4 3 WARNING The preamp terminals can carry exposed hazard...

Page 25: ...minal is a standard triaxial connector used to apply the preamp FORCE signal to the DUT The center pin is FORCE The inner shield is GUARD The outer shield is circuit COMMON Figure 1 11 Model 4200 PA c...

Page 26: ...e The AC test signal 10 mV RMS to 100 mV RMS can be DC voltage biased from 30 V to 30 V The CVU measures impedance by sourcing an AC voltage across the device under test DUT and then measures the resu...

Page 27: ...calculated from the capacitive impedance and the test frequency using the following formula Measurement functions The 4210 CVU can measure the following parameters Z Theta Impedance and Phase Angle R...

Page 28: ...hrough 1 MHz in 100 kHz increments 1 MHz through 10 MHz in 1 MHz increments The AC signal output level can be set from 10 mV RMS to 100 mV RMS 1 mV resolution The output impedance is 100 typical There...

Page 29: ...ment points is calculated by the 4210 CVU see Figure 1 17 Voltage list sweep You specify the voltage levels for the sweep not shown Step frequency sweep Includes voltage stepping A voltage sweep is pe...

Page 30: ...re timing Sweep function Force measure timing for a sweep function is similar to the timing for a bias function shown in Figure 1 18 with the following differences The hold time is repeated at the beg...

Page 31: ...e output range and DUT load settings Refer to the Reference Manual Pulse source measure connections page 11 38 for details on pulse card connectors and connections to the DUT Figure 1 19 shows a simpl...

Page 32: ...See Accessing the release notes on page 1 46 for more information Standard pulse Each channel of a pulse card can be configured for standard pulse output Figure 1 20 shows an example of standard puls...

Page 33: ...start level of the first segment and the stop level of the last segment must be the same In Figure 1 21 segment 1 start and segment 7 stop are both set for 0 0 V The stop level for a segment must be t...

Page 34: ...r more information refer to the Reference Manual seg_arb_define page 8 175 seg_arb_file This function is used to load a Segment ARB waveform into a pulse card For more information refer to the Referen...

Page 35: ...ll arb waveform is saved as a kaf file it can later be imported back into KPulse The waveform can also be loaded into the pulse generator card using the arb_file function For more information refer to...

Page 36: ...on to a prober or directly to a DUT Figure 1 23 also shows the simplified schematic of the RBT The capacitor allows pulses from the pulse generator card to pass through to the output while blocking DC...

Page 37: ...T functions as a low impedance component for high speed pulses and as a high impedance element for DC This allows the high speed pulses from the pulse generator card to pass through to the output whil...

Page 38: ...of 2 5 billion samples per second 2 5 GS s Basic pulse characteristics of the two scope cards are listed in Table 1 2 See the supplied ZTEC User s Manual for complete specifications of the scope card...

Page 39: ...ed in the table for 50 and voltage offset must not be set greater than 10 V To avoid settings conflicts first set voltage offset to 0 V and then select the 10 V range These settings are compatible wit...

Page 40: ...rence ZTEC User s Manual Sweep offset reference The offset reference determines when sampling occurs in relationship to the trigger event Offset reference can be set from 0 0 0 to 1 0 100 For the foll...

Page 41: ...m code Also the number of points per point can be set using average equivalent time points to increase the resolution of the waveform Average equivalent time points When using the equivalent time acqu...

Page 42: ...ess to the SMU SENSE LO signals Figure 1 26 Ground unit Basic ground unit characteristics are summarized in Table 1 4 Basic circuit configurations Ground unit connections Figure 1 27 shows how the var...

Page 43: ...29 includes the preamp As shown in these figures the GNDU FORCE signal provides the return path for SMU or preamp FORCE current For detailed information about the ground unit SMU and preamp connection...

Page 44: ...al connections refer to the Reference Manual Basic source measure connections page 4 3 CAUTION The maximum allowed voltage between circuit COMMON and chassis ground is 32 V DC FORCE terminal The FORCE...

Page 45: ...terminal The COMMON terminal is a binding post that provides access to circuit COMMON NOTE Normally a link is connected between ground unit COMMON and chassis ground but it may be necessary to remove...

Page 46: ...st fixture equipped with three lug triax connectors is necessary to connect the 4200 SCS discrete device for testing Figure 1 31 shows a basic test fixture to use with a two terminal device For best p...

Page 47: ...he fixture does not contact the exterior enclosure For more details about the 4200 SCS interlock system see the Reference Manual Control and data connections page 4 20 CAUTION Asserting the interlock...

Page 48: ...Answering No makes your system nonfunctional until you reinstall the software Open KITE To start KITE open the default project and select the vds id test 1 Start KITE by double clicking the KITE icon...

Page 49: ...g Started Figure 1 32 Default project directory 1 From the File menu click Open Project 2 Use the browser to select the default project 3 Click Open to open the default project From your windows brows...

Page 50: ...test module To locate the vds id test module go to the project navigator as shown in Figure 1 34 Figure 1 34 Interactive Test Module vds id Project Navigator Message Area Toolbar KITE Workspace Selec...

Page 51: ...V SMU2 is used to perform a 51 point sweep of drain voltage 0V to 5V at each gate voltage A current measurement is performed at each voltage sweep point To define a test 1 The setup for SMUs and the G...

Page 52: ...d Also the ACTIVE indicator light located on the lower right hand corner of the front panel of the 4200 SCS will be on while the test is running When the test is finished the Run test button turns gre...

Page 53: ...ave NOTE The default directory path for exporting data is C S4200 kiuser export View and save the graph data The graph for the vds id test is displayed by clicking the Graph tab for the test A sample...

Page 54: ...graph line properties see Figure 1 39 below Figure 1 39 Graph settings menu To learn more about Data Series Properties refer to the Reference Manual Defining the plot properties of the graph colors l...

Page 55: ...on page 1 46 for more information WARNING Make sure to power the 4200 SCS with an uninterruptable power supply during the firmware upgrade process This is important because an interruption of the fir...

Page 56: ...al Accessing the release notes You can access the release notes by clicking on the Complete Reference icon on the 4200 SCS desktop refer to Figure 1 42 and then clicking the Release Notes link see the...

Page 57: ...l connections 2 17 Configuring forcing functions for each device terminal 2 17 Configuring pulse mode 2 20 Basic test execution 2 21 Project navigator check boxes 2 21 Tests ITMs and UTMs 2 21 Device...

Page 58: ...to manage graphical test results in the Graph tab 2 38 Opening a Graph tab 2 38 Accessing the Graph tab windows 2 39 Opening the graph settings menu 2 39 Understanding the graph settings menu 2 40 Def...

Page 59: ...e dual channel pulse generator cards are integrated inside the Model 4200 SCS mainframe Keithley Scope tool KScope A virtual front panel software application used to control the optional scope card Th...

Page 60: ...site or die For one site For multiple sites View test results numerically and graphically Analyze test results using built in parameter extraction tools View the analysis results numerically and graph...

Page 61: ...of a project plan Verify project plan execution Insert project plan components Save and print project plan files View KITE help 6 Message area Displays KITE error warning and execution messages 7 Sta...

Page 62: ...s a call into user module written in C All test definition data and graphing is located here Can be used for all instrumentation internal and external to the 4200 Typically used for switch matrix conn...

Page 63: ...en wafer location This location is comprised not only of end product dies but usually has one or more parametric test structures or subsites KITE refers to such a repeating pattern of dies and test st...

Page 64: ...ng an ITM and Defining a UTM The primary differences between ITMs and UTMs are summarized in Table 2 1 Table 2 1 Primary differences between an ITM and a UTM ITM UTM Is always configured using a serie...

Page 65: ...t navigator Defining an ITM An ITM is defined by the ITM definition tab displayed by double clicking the ITM name in the project navigator illustrates and explains the ITM definition tab Figure 2 4 de...

Page 66: ...peration of the UTM or the overall project execution The GUI view Figure 2 6 uses a variety of ways to enter values typing text in Timing button and Speed box Custom and preconfigured test timing nois...

Page 67: ...ble in the classic view If a parameter s use is unclear check if the parameter has any hovertext help position the mouse pointer over the parameter entry field Additional Workspace window tab When wor...

Page 68: ...r modules box Status tab Formulator Mathematical test results analysis tool Graph tab Graphical test and analysis results Test definition and Sheet tab Numerical test and analysis results Test module...

Page 69: ...ions A single click of the force measure button displays the Forcing Functions Measure Options window for the terminal Provides access to the Formulator which allows in test and post test data computa...

Page 70: ...tab Voltage sweep List sweep Current List Sweep Steps through a list of user specified current values or voltage values at a rate that is determined by the timing and speed settings in the ITM definit...

Page 71: ...trical Setting the master SMU count to an odd number will cause the slave SMU to repeat the last sweep point NOTE The slave SMUs will not automatically set for dual sweep when dual sweep is enabled fo...

Page 72: ...evel during the pulse on time If the SMU is set to measure the measurement will occur after the on time expires and before the transition to the off time level This effectively increases the on time b...

Page 73: ...project navigator double click the ITM that you wish to configure The definition tab of the ITM window opens by default see Figure 2 4 2 In the definition tab review the virtual connections for each d...

Page 74: ...1 On the instrument object for the terminal Figure 2 4 click the FORCE MEASURE button The corresponding Forcing Function Measure Options window appears The Forcing Functions Measure Options window in...

Page 75: ...s forcing functions For details see Understanding pulse mode on page 2 16 Describes the instrument selected for this device terminal and the mode of the test being performed Sweeping mode or Sampling...

Page 76: ...sired measuring options 3 Click OK The configuration for this device terminal takes effect and the Forcing Functions Measure Options window closes 4 If using pulse mode see Configuring pulse mode 5 Re...

Page 77: ...or plan is disabled Clicking a check box either inserts a check mark to enable or removes a check mark to disable Only enabled check marked tests or plans can be run There is interaction between the p...

Page 78: ...eck marks for all of its device plans and tests Removing the check marks for all the tests in the subsite plan also removes the check mark for the subsite plan Initialization and termination steps Rem...

Page 79: ...signing a site number label to individual test and test sequence data page 6 30 Running the test To run a selected test 1 Click the green Run Test Plan button 2 Select Run in the Run menu or press the...

Page 80: ...de overall test sequence performance The best Model 4200 SCS system performance is obtained by storing all KTE Interactive application files on the Model 4200 SCS internal hard drive There sweep and s...

Page 81: ...disk drive including a network drive except CD CD R CD RW drives and write protected drives or directories The default user directory contains several subdirectories Each of these subdirectories is d...

Page 82: ...Figure 2 16 Device library access selection NOTE For more information about Device Library access selection refer to the Reference Manual Customizing directory options page 6 340 Each device stored in...

Page 83: ...Device Library 1 In the C S4200 kiuser Devices MOSFET directory locate the following three files which define the existing library device called 3terminal n fet 3terminal n fet kdv 3terminal n fet bm...

Page 84: ...in a project folder Figure 2 19 shows the folders of KITE projects that are included with KTE Interactive The expanded default project folder shows the pre defined project file structure Table 2 3 Lin...

Page 85: ...subdirectory contains the KITE test library that is provided with each version of KTE Interactive Also by default you can access this test library when operating KITE You can copy tests from this libr...

Page 86: ...tories tab of the KITE Options window that appears choose Test Libraries in the Show Directories for Combo box See Figure 2 20 Figure 2 20 Test library access selection NOTE For more information about...

Page 87: ...0 SCS user libraries when operating KITE and KULT For more information about this directory refer to the Reference Manual Managing user libraries page 8 39 System directory C S4200 sys All binary and...

Page 88: ...as discussed in the Reference Manual Append execution of tests test sequences and Project Plans page 6 168 Each Append worksheet behaves like a Data worksheet However its data cannot be plotted on a...

Page 89: ...3 Model 4200 SCS User s Manual Section 2 Model 4200 SCS Software Environment Figure 2 22 Data worksheet of a Sheet tab containing data for multiple sweeps Figure 2 23 Data worksheet of a Sheet tab con...

Page 90: ...te The Data worksheet also contains the results of any formulator calculations that were performed on the last generated data Features of the Data worksheet are Data is reported in Microsoft Excel com...

Page 91: ...at the bottom of all Sheet tab windows identifies the source of the data in the Sheet tab as shown in Figure 2 25 Figure 2 25 Data source identifier Click Click Select The type of test ITM or UTM Nam...

Page 92: ...er simultaneously in a single xls file 1 Click Save As in the upper right corner of any of the three worksheets The Save As window displays with workbook xls as the default file type See Figure 2 26 F...

Page 93: ...ion replaces the data from the fourth Append execution Refer also to Reference Manual Append execution of tests test sequences and Project Plans page 6 168 Each Append worksheet is labeled with a sepa...

Page 94: ...sadvantages for each method Clear Append data method for deleting Append worksheets Use the Clear Append Data function to permanently delete any or all Append worksheets for a selected test test seque...

Page 95: ...essing the Graph tab windows Several Graph tab windows control the properties of a graph You can access these windows in two ways Use the graph settings menu When defining a graph you typically access...

Page 96: ...and scale formatting For more information refer to the Reference Manual Defining the axis properties of the graph page 6 212 Cursors Opens the Cursors window from which you can select and format curs...

Page 97: ...ore information refer to the Reference Manual Changing area properties of the graph page 6 276 Legend Opens the legend properties window which allows you to reformat the font text or background color...

Page 98: ...other contents 3 of every first row cell of the data and Calc worksheets If you have generated Append worksheets 4 for the test the Data Series column also lists the names of every first row cell in...

Page 99: ...can plot multiple parameters on the Y1 and Y2 axes Understanding buttons in the Graph Definition window The buttons of the Graph Definition window are used as follows Clear all Click the Clear All bu...

Page 100: ...of four plots based on the selections shown in Figure 2 32 The family of curves corresponds to four sets of data generated by drain voltage sweeps at four different gate voltages Figure 2 33 View of v...

Page 101: ...it with a name that does not duplicate a device name that is already in the library To submit a device to a library 1 In the project navigator locate the subsite plan that contains the device plan you...

Page 102: ...g Options on the Tools menu through the Tools Options menu 4 In the Device Library directory tree select a destination folder that is appropriate for the devices 5 In the Device Sequence Table of the...

Page 103: ...original name of the device or if you selected multiple devices displaying the original name of one of the devices See Figure 2 37 Figure 2 37 Submit device dialog box 7 In the As edit box of the Sub...

Page 104: ...e 2 38 Figure 2 38 Unconfigured UTM message To submit the UTMs or ITMs for simplicity these will be referred to as tests for the rest of this topic 1 In the project navigator locate the device plan th...

Page 105: ...by selecting Options on the Tools menu 4 In the Test Library directory tree select a destination folder that is appropriate for the tests 5 In the Test Sequence Table of the device plan window select...

Page 106: ...e of the test or if you selected multiple tests displaying the original name of one of the tests See Figure 2 42 Figure 2 42 Submit test dialog box 7 In the As edit box of the Submit test dialog box t...

Page 107: ...3 16 Setting the AC drive conditions 3 16 Measure settings 3 16 Test conditions 3 16 Advanced settings terminal properties 3 16 Status 3 18 Compensation 3 19 CVU ITM examples 3 19 CVU Voltage Bias 3 1...

Page 108: ...ests on my device 3 66 Connecting devices for stress measure cycling 3 66 Overviewing the cycling related tabs 3 67 Configuring subsite cycling 3 67 Understanding the Subsite Setup tab 3 67 Configurin...

Page 109: ...3 124 Flash switch tests 3 124 Running any Flash Project for the first time 3 125 Running the Flash NAND Flash NOR or Flash Switch Project 3 126 Running the Program or Erase UTM 3 127 Running the Fast...

Page 110: ...The Keithley Interactive Test Environment KITE default project contains the most common I V tests a typical user might perform on a regular basis These tests serve as examples and intended to be copi...

Page 111: ...SFET tests vds id This test generates a family of I V curves on a 4 terminal n MOSFET and plots drain current versus drain voltage vtlin This test runs a typical linear curve fit to find the threshold...

Page 112: ...terminal NPN BJT tests vce ic This test runs nested I V sweeps to generate an n p n transistor collector family of curves Collector current is plotted vs collector voltage gummel This test runs two v...

Page 113: ...ests Two wire resistor test By default the following test uses two SMUs It is also possible to use one SMU and the GNDU see Figure 3 4 Figure 3 4 Two wire resistor test Description of two wire resisto...

Page 114: ...project were written for standard discrete parts but can be easily modified for use with other discrete devices or devices on a semiconductor wafer To see exactly what discrete DUTs these tests were...

Page 115: ...triax cables for preamp and connecting to the SMU PA source and sense connectors on one end and to your DUT on the other The SenseLO SMU connector is used only in special cases For additional details...

Page 116: ...any way when upgrading the 4200 SCS software or uninstalling KTE Interactive See the Model 4200 SCS Release Notes Installation Instructions in the Model 4200 SCS Complete Reference for details on all...

Page 117: ...le click the device node that is the parent of the test you want to copy 2 Select one or more tests from the Test Sequence Table hold down the Shift or Ctrl key while clicking with the mouse to select...

Page 118: ...rting KITE perform the following steps see Figure 3 9 To change KITE startup behavior 1 Select the KITE Tools Options menu item 2 To change which project opens when starting KITE click the Change butt...

Page 119: ...ITMs provided by Keithley Instruments are documented in Reference manual C V project plans page 15 28 NOTE Details about KITE ITMs are provided in Reference manual Keithley Interactive Test Environme...

Page 120: ...ast Good choice for quick measurements where noise and settling time are not concerns Normal Provides a good combination of speed and low noise and is the best setting for most cases Quiet Best choice...

Page 121: ...he sweeping mode Sweep Delay and Hold Time can be set from 0 to 999s Use the drop down menu to select units s ms or s For the sampling mode Interval and Hold Time can be set from 0 to 999s Use list to...

Page 122: ...U are listed in Table 3 1 After configuring the device terminals Terminal settings measurement speed Speed and the test mode Mode a forcing function can be selected from the Forcing Function drop down...

Page 123: ...owing frequency points 800 kHz 900 kHz 1 MHz 2 MHz 3 MHz Measure settings Referring to the Measure Settings area indicated in Figure 3 12 use the drop down menu for Parameters to select one of the fol...

Page 124: ...e data sheet see the Reference manual Figure 15 175 A default name for example F_AB can be changed by typing in a different name Advanced settings terminal properties The AC drive voltage and DC bias...

Page 125: ...DCV Simplified Test Circuit Source 0 VDC Configuration B Use the following settings to source AC drive voltage to terminal B source DC bias voltage to terminal A and measure AC current at terminal A...

Page 126: ...sation After making connections for the test connection compensation must be performed and enabled before running test See the Reference manual Connection compensation page 15 18 to perform connection...

Page 127: ...ime 2 The DC source goes to the DC bias voltage of 1 V 3 After the built in system delay and Interval the 4210 CVU makes a measurement The AC test signal is applied just before the start of the measur...

Page 128: ...in system delay and programmed delay the 4210 CVU makes a measurement The AC test signal is applied just before the start of the measurement AC drive is turned off after the measurement is completed...

Page 129: ...a FFMO window with CVU Voltage List Sweep selected as the forcing function to measure Cp Gp The Sweeping test mode must be selected for this test see Figure 3 11 Figure 3 19 Forcing Function CVU Volt...

Page 130: ...C bias voltages The hold time delay repeats at the beginning of each subsequent step The sweep delay hold time and output disable are set from the ITM timing window for sweeping Figure 3 20 CVU Voltag...

Page 131: ...easurement for the first frequency point 100 kHz The AC test signal is applied just before the start of the measurement AC drive is turned off after the measurement is completed 4 Step 3 is repeated f...

Page 132: ...ee Figure 3 24 the following force measure sequence occurs 1 The DC source goes to the PreSoak voltage of 1 V 2 After the hold time DC bias goes to 0 V 3 After the system delay and the programmed dela...

Page 133: ...tible with the PMU or RPM Introduction PIV A and PIV Q Pulse I V is used in addition to DC IV test results to address two DUT behaviors self heating also called joule heating and transient charging Fo...

Page 134: ...e measurement happens during the flat settled part of the pulse Typical tests are IV sweeps such as a Vds Id family of curves or a Vgs Id curve used for Vt extraction The second method is transient te...

Page 135: ...er power devices based on smaller dimensions and silicon on insulator SOI technology where it is more difficult for the heat generated by the transistor to leave its immediate surroundings Note that t...

Page 136: ...anual Pulse Source Measure Concepts page 11 1 explains front panel operation and provides remote programming information for individual control of the pulse generator and scope For remote programming...

Page 137: ...MUs and RBTs 2 SMA female to BNC Male Adapt SCP2 BNC channels to SMA 1 SMA female to SMB plug Adapt SCP2 SMB trigger to SMA 1 Power Divider Male Female Male Connects to Gate side RBT AC IN connector M...

Page 138: ...he upper or back socket located near the hinge is for Pulse IV or Pulse IV DC testing and uses two SMA connectors The SMU socket has a triax connector for each of the four DUT pins The pulse socket us...

Page 139: ...ic Prober Interconnect The PIV A package provides both DC and Pulse capability to the DUT pins without re cabling or switching The key to this capability is the RBT which uses passive electrical compo...

Page 140: ...Two 4200 PRB C cables are included with the 4200 PIV A package which allows testing of either three or four terminal FETs Many DC probe manipulators are available with SSMC connections at the probe n...

Page 141: ...n 15 cm supplied with the PIV A package to connect directly from the RBTs to the RF manipulators The RBT with the power divider is connected to the Gate For additional information see the documentatio...

Page 142: ...F probe manipulators as shown in Figure 3 33 To use the supplied 8101 PIV test fixture see Figure 3 28 connect the SMA cables from the RBTs to the 8101 PIV Test fixture as shown in Figure 3 34 Install...

Page 143: ...17 Return to Section Topics 3 37 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 33 Pulse IV connections using RF G S G probes Figure 3 34 Pulse IV connections usi...

Page 144: ...Figure 3 36 shows the project plan that is displayed on the left side of the KITE window 4 Connect or touch down on the chosen DUT 5 Verify the setup as follows i Follow the instructions for Running...

Page 145: ...p dialog box and disconnect all connections to the scope card 5 The scope performs an autocal which takes about one minute 6 The test is complete when the Run button turns green In the Sheet tab autoC...

Page 146: ...ute 7 The third dialog box requests that the probe pins be connected to each other through another device Lower the probes onto another device 8 Click OK on the Through dialog box see Figure 3 37 righ...

Page 147: ...If using the 8101 PIV test fixture insert the metal can SD 210 DUT as shown in Figure 3 35 To run the three gate voltages using single curve vds id pulse 1 Ensure that the VdStart VdStop VdStep value...

Page 148: ...ulse vs dc UTM 1 If measurement parameters pulse average NPLC measure range need to be set use the definition table 2 Optional If only source parameters need to be changed use the UTM GUI by clicking...

Page 149: ...outine and the Comparing DC and pulse results or use the single DC and Pulse UTM as described in Running vgs id pulse vs dc UTM Alternately the source values may be entered using the UTM GUI 1 Ensure...

Page 150: ...ines both DC and pulse tests see Figure 3 44 1 If measurement parameters pulse average NPLC measure range need to be set use the definition table 2 Optional If only source parameters need to be change...

Page 151: ...imate calibration factors applied but the calibrated measurement is given in the lower left portion of the Graph tab Note that the Data Variables values in the lower left corner just display the Data...

Page 152: ...his setting which controls how many pulses are used to return a result not how many pulses are sent to the DUT LoadLineCorr Turns drain side load line correction on or off This is similar to the vds i...

Page 153: ...DC data into the pulse Calc worksheet right click cell A1 and select Paste from the drop down menu If there is previous data in the Calc worksheet the paste operation will overwrite it Figure 3 47 sh...

Page 154: ...2017 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 46 Highlighting all entries in vds id data sheet Figure 3 47 Data from vds id pasted into vds id pulse calc s...

Page 155: ...etailed information following the table Table 3 3 Pulse IV UTMs User Module Description cal_pulseiv Performs a cable compensation routine vdsid_pulseiv Performs a pulsed Vd Id sweep vdId_Pulse_DC_Fami...

Page 156: ...ed to GateSMU with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain For detailed connection information refer to the PIV A interconnect...

Page 157: ...be connected to the gate The RBT connected to DrainSMU should be connected to the drain For detailed connection information refer to the PIV A interconnect assembly procedure on page 3 35 Table 3 6 Re...

Page 158: ...r a fixed range where V I 50 Valid voltages are 0 050 0 1 0 2 0 5 1 2 5 10 LoadLineCorr int Determines whether to use load line correction to compensate for the voltage drop caused by the 50 sense res...

Page 159: ...mits are given below except the 4200 PIV A with the 4200 RBT has a max pulse width of 150 ns not the 250 ns of the 4205 RBT All voltage levels specified below assume a 50 DUT load Connection The sourc...

Page 160: ...nal sweep value for Vd For DC only sweeps VdStop must be between 200 V to 200 V dependent on the type of SMU and the current requirements of the DUT VdStep double The number of steps for the Vd sweep...

Page 161: ...ited Auto 1 nA 5 Limited Auto 10 nA 6 Limited Auto 100 nA 7 Limited Auto 1 A 8 Limited Auto 10 A 9 Limited Auto 100 A 10 Limited Auto 1 mA 11 Limited Auto 10 mA 12 Limited Auto 100 mA LoadLineCorr int...

Page 162: ...ily_pulseiv Output Type Description DrainVProg_DC DrainVProg_Pulse double Array of programmed drain voltage values DrainVMeas_DC DrainVMeas_Pulse double Array of measured drain voltage values DrainI_D...

Page 163: ...Range 16 Invalid DrainSMU Range Table 3 13 Inputs for vgsid_pulseiv Input Type Description Vds double The drain source voltage output by the DrainSMU defined below Vg_off double The DC bias applied by...

Page 164: ...200 systems with the 4200 PIV package GateSMU char The SMU used for the Gate This can be SMU1 up to the maximum number of SmUs in the system DrainSMU char The SMU used for the Drain This can be SMU1 u...

Page 165: ...05 RBT The RBT connected to GateSMU the RBT with the Power Divider should be connected to the gate The RBT connected to DrainSMU should be connected to the drain Use either G S G probes for RF structu...

Page 166: ...ultiplying the largest desired pulse width PW by 1000 Example PW 150 ns so Period 150 s AverageNum int The number of pulses to average at each step of the sweep For best low signal performance set Ave...

Page 167: ...current compliance for the DUT Drain NPLC double The DC measurement integration time in NPLC Number of Power Line cycles DCSourceDelay double Time in seconds between the DC source and measure for each...

Page 168: ...voltage either supplied by the pulse card or the SMU for the drain GateVMeas_DC Pulse double The measure gate voltage from channel 1 of the 4200 SCP2 in the case of pulse and the measured voltage on...

Page 169: ...The period must be set so that the Duty Cycle DC is no more than 0 1 This period is most easily calculated by multiplying the largest desired pulse width PW by 1000 Example PW 150 ns so Period 150 s A...

Page 170: ...ain For detailed connection information refer to the PIV A interconnect assembly procedure on page 3 35 Table 3 20 Outputs for scopeshot_cal_pulseiv Output Type Description Time double Array of time v...

Page 171: ...or the drain Either 50 or 1E6 Use 50 for Pulse IV with RBTs DrainRange double The scope card channel 2 Y scale voltage range for the drain measurement Typical values are 1 2 5 V PulsePeriod double The...

Page 172: ...ctor or LDMOS RF transistors or any device may benefit from low duty cycle pulse IV testing This application uses the 4200 PIV Q package which differs from the 4200 PIV A package by 1 Pulsing both the...

Page 173: ...t common parametric transistor tests Vds id Vgs id These tests are provided in both DC and Pulse modes allowing correlation between the two test methods These tests and initialization steps for scope...

Page 174: ...an example of such connections for an HCI evaluation Figure 3 49 Stress measure wiring example 4210 SMU 5 Ground Unit During Characterization of Each Transistor Vds SMU3 Vgs SMU1 Vbb SMU2 Vss Ground U...

Page 175: ...formed when in When a stress measure mode is selected use to apply and save the settings you have entered in the Setup tab This button also applies and saves settings made in the Device Stress Propert...

Page 176: ...RPMs during the transition from measure to stress ensure that the instruments connected to the RPMs are configured in KCON see Reference manual Tools Update DC Preamp and RPM Configuration page 7 9 S...

Page 177: ...ring its KITE calculates cumulative stress times for the cycles seconds based on the values that you enter First Stress Time Last Stress Time and son on Specify Log Specify the amount of time seconds...

Page 178: ...e Cycle Times Specify these intervals as shown in Figure 3 57 NOTE You can use the Periodic Test Interval Log area only if you select Log in the Stress Measure Cycle Times area the Periodic Test Inter...

Page 179: ...the subsite setup configuration In the Rate s field enter the periodic interval in seconds at which stressing is to be stopped and tests are to be performed in addition to any intervals that are spec...

Page 180: ...Figure 3 59 Device Stress Properties Setup steps for first device in Subsite Plan Table 3 25 Setup steps for the first device in the Subsite Plan Step Description 1 Select the wafer site number See Mu...

Page 181: ...rea of the window the 2 pin assignment and the checked box for VPU indicates that the gate is connected to channel 2 of the VPU 7 Use the lists to control Stress Measurements Options include Do Not Me...

Page 182: ...not measure in this instance The stress measurement settings for the source and bulk are not relevant since there are no SMUs connected to the device NOTE The AC stress settings support multiple puls...

Page 183: ...01 Rev K February 2017 Return to Section Topics 3 77 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 60 AC stress properties settings Figure 3 61 VPU common settin...

Page 184: ...ating pulsed stress testing provides additional data that permits a better understanding of device performance in frequency dependent circuits NOTE Key test parameters are contained in Table 3 26 1 Co...

Page 185: ...Device Characterization Tests Figure 3 63 AC Pulse stress measure hardware matrix card simplified schematic 4200 SMU 1 4200 SMU 2 4200 SMU 3 4205 PG2 4200 SCS Model 7072 Matrix Card 8 x 12 Model 708A...

Page 186: ...O SENSE FORCE PA CNTRL KEITHLEY KEITHLEY Channel 1 Channel 2 Ext Trg Ext Clk Row E A Adapter BNC Male to 3 lug Triax Male B Adapter SMA Female to BNC Female Model 7072 side view to show connector adap...

Page 187: ...ut channels allowing two devices to be stressed by AC voltage NOTE Current stressing When setting the current stress level for each device in the subsite plan keep in mind that a setting of zero 0 con...

Page 188: ...l all be automatically connected to the same SMU through the switch matrix That SMU will supply the voltage stress to all the pins simultaneously Figure 3 65 Example of device pin connections to a mat...

Page 189: ...or an absolute value When all Targets for a device are reached that device will not be tested for subsequent cycles The Subsite Plan will stop when all enabled targets are reached or the last subsite...

Page 190: ...keep stress on as long as possible so the DUT doesn t have time to relax before the tests are performed Clear copy paste and paste to all sites Clear Clicking the Clear button clears all stress prope...

Page 191: ...e stress using Segment ARB waveforms and the SMUs provide voltage bias and current limit There are no measurements performed during the stress phase NOTE Refer to Segment ARB stressing on page 3 86 fo...

Page 192: ...mple of how a DUT can be stressed using Segment ARB waveforms During a stress phase the matrix shown in Figure 3 67 connects the channels of the Keithley pulse card to the drain and gate of the DUT Th...

Page 193: ...l unit of time for stressing In the subsite setup tab stress counts specify the number of times the Segment ARB waveform stresses the device For example assume the stress count is 3 and the waveform p...

Page 194: ...continue the configuration process Figure 3 70 Segment stress measure mode Log and list cycle counts Linear cycle counts After setting the first and total stress counts and the number of stresses the...

Page 195: ...card in the system Model 4225 PMU 4220 PGU 4205 PG2 or 4200 PG2 Select the pulser to be configured 3 SMU Pins No switch matrix With no switch matrix the active SMU pin fields must be set to 0 no conn...

Page 196: ...test sequence for the basic Stress measure mode described later in this section NOTE Output Values are imported into this target list from the ITM UTMs in the device plan see the Reference manual ITM...

Page 197: ...subsites are configured for subsite cycling they can all be run consecutively When the first subsite is finished cycling the next subsite will start automatically Multiple subsite cycling is started f...

Page 198: ...1 test Column DStarting with Cycle 2 lists the Change between each post stress IDOFF reading and the pre stress IDOFF reading Cycle 1 The Change for an Output Value is calculated as follows 291 1666E...

Page 199: ...ABS 82 2013e 15 291 1666e 15 291 1666e 15 x 100 ABS 208 9653e 15 291 1666e 15 x 100 ABS 0 7176 x 100 71 8 Column EThis is the Target Value that was assigned to the Output Value in the Device Stress P...

Page 200: ...or the Stress Measure Mode is shown in Figure 3 76 It is similar to the Settings window for the Cycle Mode and includes information on Targets For each enabled Target the Target Value is listed After...

Page 201: ...01 Rev K February 2017 Return to Section Topics 3 95 Model 4200 SCS User s Manual Section 3 Common Device Characterization Tests Figure 3 75 Subsite Data Settings window for Cycle Mode Subsite cyclin...

Page 202: ...Mode plot Output Values versus the cycle index Each data point in the graph represents an Output Value reading for each subsite cycle Figure 3 77 explains how to display the various graphs Figure 3 7...

Page 203: ...ach stress cycle stress time Figure 3 78 explains how to show the graphs for a selected device test Figure 3 78 shows the graph traces for test ID 1 for the 4terminal n fet device The three traces are...

Page 204: ...ice plan for the type of device to be tested For example if testing a 4 terminal n channel MOSFET insert the 4terminal n fet device into the subsite plan 2 Under the device plan insert a new test ITM...

Page 205: ...e 6 141 6 Save the project plan by selecting Save All from the File menu at the top of the KITE window You can also save the project by clicking the Save All button on the toolbar 7 Repeat steps 2 thr...

Page 206: ...NOTE The 4200 SCS FLASH package does not include a 4200 SCP2 2 channel scope card When using the Models 4205 PG2 or 4220 PGU the scope card can be added for manual pulse height verification Since the...

Page 207: ...lse resources are disconnected and the DC resources are connected to the DUT The pulses are used to move charge to or from the floating gate There are two different methods to move charge 1 Tunneling...

Page 208: ...e using HEI These conditions are only examples with approximate voltage values and both pulse width and pulse height will vary depending on device structure and process details There are many other wa...

Page 209: ...isolation relays located on the cards it is possible to configure a simpler setup without the external switch matrix see Figure 3 85 and Figure 3 89 The advantage of the simpler setup is lower cost w...

Page 210: ...ry 2017 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 84 Block diagram of an example flash test setup using a switch matrix Figure 3 85 Block diagram of a flash...

Page 211: ...mplemented by using the Segment ARB capability For more information about waveforms refer to the Reference manual Pulse Source Measure Concepts page 11 1 There are many different methods and voltage l...

Page 212: ...rase phase the relays in the PG2 channels are closed and the relays in the SMUs are open For the DC measure phase the opposite is true Figure 3 89 Basic schematic of flash testing without a switch mat...

Page 213: ...ent is a VT extraction based on a Vg Id sweep but any type of DC test may be configured This test is similar to the endurance test but the pulsing and measuring are performed on adjacent devices Figur...

Page 214: ...ld have to be manually reconfigured or re cabled to test other devices Without a switch matrix the number of adjacent cells that can be measured is limited Therefore it is recommended that a switch ma...

Page 215: ...red drain voltage is performed iteratively with an oscilloscope to measure VD during the pulse The projects in the Flash package use two methods to define the multi level waveforms used in flash memor...

Page 216: ...d as a typical trigger but as a synchronizing signal between pulse cards see the Reference manual Multi channel synchronization with the Segment ARB Mode page 11 36 NOTE It is recommended to use trigg...

Page 217: ...s have been partially pre defined to reduce the number of parameters required Figure 3 102 defines the parameters for the single pulse Program and Erase waveforms NOTE The sign of the PulseVoltages ar...

Page 218: ...2 See Figure 3 94 for two examples of array dialog box displayed after clicking the grey bar on the corresponding UTM parameter see Figure 3 93 red arrows one through five NOTE The number of parameter...

Page 219: ...hat incorporate both a pulse channel and a SMU signal into a single cable to a DUT terminal Supplying the shared SMU information allows the software to open the SMU relay during the pulse output which...

Page 220: ...mon Device Characterization Tests Model 4200 SCS User s Manual Figure 3 93 Flash NAND Project Definition Tab including arrows for the 6 input arrays Figure 3 94 Flash NAND pulsevoltages array entry an...

Page 221: ...need to be simultaneously pulsed including terminals that must change from connected to disconnected or open states see Figure 3 82 and Figure 3 88 for either the program or erase condition The minim...

Page 222: ...rray structure without using a switch matrix as one example is shown in Figure 3 96 4205 PG2 1 Trigger IN Chan 2 4205 PG2 2 4 25 11 cm 8 20 cm Chan 1 Chan 2 Trigger IN Trigger OUT Chan 1 Trigger OUT 4...

Page 223: ...DUT connections Disturb testing 4205 PG2 1 Trigger IN Chan 2 4205 PG2 2 4 25 11 cm 8 20 cm Chan 1 Chan 2 Trigger IN Trigger OUT Chan 1 Trigger OUT 4200 SMU 4210 SMU Force 4200 SMU 4210 SMU Force 4200...

Page 224: ...be manipulators LEMO Triax Connector Instrument Connectors SMA Connector SMA Tee male female male Adapters LEMO Triax to SMA Adapter SMA male to BNC female Triax female to BNC female DUT Connections P...

Page 225: ...ur channel 4200 SCS FLASH system consisting of two 4205 PG2 cards 4 pulse channels as well as four SMUs either 4200 SCS SMU or 4210 SMU with SMU preamps removed see Figure 3 83 or Figure 3 84 To test...

Page 226: ...card This second card is the card to the immediate left of the card in step 3 NOTE If the FLASH package consists of more than two PG2 cards continue to connect the cable and Tees to the adjacent card...

Page 227: ...mory folder FlashDisturb NAND FlashDisturb NOR FlashEndurance NAND FlashEndurance NOR NOTE In all of the following steps when necessary torque both connections using the wrench 1 Set up the 4200 SCS r...

Page 228: ...NNEL 2 of the PG2 in the right most slot PG2 in the slot with the lowest number 22 Carefully insert the LEMO Triax connector from step 21 into the Force connector on the SMU in Slot 2 23 Route BNC cab...

Page 229: ...connect the triggering across the four cards 6 Take one SMA to BNC adapter and connect one 5 foot 1 5 m black BNC cable 7 Take the cable from step 5 and connect the SMA adapter to CHANNEL 2 of the PG...

Page 230: ...has three different sets of defaults for common setups NAND device direct connect NOR device direct connect Switch using a Keithley 707A 708A switch matrix and compatible cards This results in the pr...

Page 231: ...terminal testing requires four Model 4205 PG2 cards and for most tests a compatible external switch matrix The purpose of these projects is to initially characterize a floating gate transistor For ex...

Page 232: ...an external Keithley switch matrix NVM_examples The NVM_Examples test uses one 4225 PMU two 4225 RPMs and two SMUs to characterize NAND flash phase change memory and ferroelectric memory For additiona...

Page 233: ...flash module Program test This test uses the partially pre defined waveform shown in Figure 3 102 to program a flash memory device The Definition tab for this test is shown in Figure 3 104 Figure 3 10...

Page 234: ...Figure 3 102 to erase a flash memory device Figure 3 105 shows the Definition tab Figure 3 105 Flash NAND project Erase definition tab Fast Program Erase test This test uses a partially pre defined wa...

Page 235: ...alled Open VPU Relay and is optional for switch matrix configurations see Figure 3 97 but is recommended to prevent accidental simultaneous connection of both SMU and PG2 channels to a single terminal...

Page 236: ...terminal flash memory device Flash NOR tests The Flash NOR project has tests similar to the Flash NAND project with parameter defaults for NOR type floating gate DUTs Flash switch tests The Flash Swi...

Page 237: ...t This test is used to connect pulse or SMUs to the DUT Figure 3 110 shows the definition tab for ConPin Pulse The parameters are typed into the UTM parameter table with the Pin1 Pin2 and so on determ...

Page 238: ...tion Topics 4200 900 01 Rev K February 2017 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 110 ConPin Pulse test Definition tab Figure 3 111 ConPin Pulse test GUI...

Page 239: ...termination of the pulse settings pulse width height and transition time that will provide a target programmed or erased VT After the appropriate pulse settings are determined they can be used to perf...

Page 240: ...g final results into the Erase and Fast Program Erase tests h Ensure that the erase parameters are fully erasing the DUT i Set the parameters in the Fast Program Erase test Set NumPulses 10 ii Uncheck...

Page 241: ...U signal are combined to a single DUT terminal Figure 3 96 shows that three pairs of SMU pulse channels are shared Note the SMA tees on each of the top three SMUs that incorporate both a pulse channel...

Page 242: ...size each array Pulse1VoltagesSize PrePulse1Delays TransitionTimesPulse1Size Pulse1WidthsSize PostPulse1DelaysSize Pulse2VoltagesSize PrePulse2Delays TransitionTimesPulse2Size Pulse2WidthsSize PostPu...

Page 243: ...see Figure 3 95 and Figure 3 96 to ensure that a subsequent SMU test is only connected to the DUT terminals 1 Enter the number of shared terminals into SharedPulseTerminals Sharing means that a single...

Page 244: ...he UTM parameter list controls whether to open all switches before making any new switch closures This checkbox does not clear the state of the switches shown in Figure 3 111 3 Continue to enter value...

Page 245: ...D is shown in Figure 3 112 Stressing for the FlashEndurance NAND tests are configured from the Subsite Setup tab for the FlashEndurance subsite plan The default setup shown in Figure 3 113 and Figure...

Page 246: ...4200 900 01 Rev K February 2017 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 113 FlashEndurance NAND project Subsite Plan tab Figure 3 114 FlashEndurance NAND p...

Page 247: ...ization Tests Figure 3 115 FlashEndurance NAND project Subsite Graph tab Program test The Definition tab for this test is shown in Figure 3 116 This test uses a partially predefined Segment ARB wavefo...

Page 248: ...s from the DUT It does this by opening the HEOR for each VPU channel Disconnecting the VPU channels allows for accurate DC results The SetupDC test is a UTM that should be used when using a directly w...

Page 249: ...te of the DUT and measure the drain current at each sweep step The default Definition tab for this test is shown in Figure 3 118 SMU3 is configured to perform a 101 point sweep from 0 to 5 V in 50 mV...

Page 250: ...01 Rev K February 2017 Section 3 Common Device Characterization Tests Model 4200 SCS User s Manual Figure 3 118 FlashEndurance NAND project Vt MaxGm Program Definition tab Figure 3 119 FlashEndurance...

Page 251: ...and measure the drain current at each sweep step SMU3 is configured to perform a 101 point sweep from 0 to 5 V in 50 mV steps SMU1 is configured to DC bias the drain at 0 5 V and measure current at e...

Page 252: ...nd methods This section will explain the tests and how to set parameter values for Endurance testing or Disturb testing Before using any of these projects determine the appropriate pulse voltages and...

Page 253: ...ulses while using the oscilloscope to measure the pulse height Iterate by modifying the PulseVoltages to reach the target voltage 7 Once the appropriate voltage level is determined the appropriate pul...

Page 254: ...near the number of total stress intervals ii For log the number of stress intervals per decade count of stress counts e Press the Apply button to see the updated Stress Counts and intervals 4 Click th...

Page 255: ...rement such as VT on a device adjacent to the pulsed device The goal is to measure the amount of VT shift in adjacent cells either in the programmed or erased states when a nearby device is pulsed wit...

Page 256: ...files Flash NAND Vg ksf and Flash NAND Vd ksf used for stressing are loaded into the device stress properties window shown in Figure 3 123 The stress properties window is opened by clicking the Devic...

Page 257: ...elay before the first pulse is output Valid values range from 20 ns to 1 s in 10 ns increments s TransitionTimesPulse1 double The amount of time it will take the first pulse to rise fall 0 100 100 0 f...

Page 258: ...0 V base voltage Valid values are 20 ns to 1 s in 10 ns increments s NumPulses int The number of pulses to output range 1 to 231 about 4 2 billion NumSMUBiasTerminals int The number of bias SMUs to in...

Page 259: ...losed Error codes 0 No Errors 16001 Invalid number of pulse terminals 16002 PulseVoltagesSize has to match the number of pulse terminals 16003 PrePulseDelaysSize has to match the number of pulse termi...

Page 260: ...hs PostPulseDelays This rule must be followed for any Program Erase or Fast Program Erase UTM 3 Ensure that all time based pulse parameters are not zero The minimum time interval is 20 ns 20 E 9 This...

Page 261: ...he drain is to use an oscilloscope with the scope input impedance set to 1 M a Ensure that the gate voltage level meets the desired value before setting other volt age levels b Modify the PulseVoltage...

Page 262: ...ain current response is captured allowing a Vgs Id curve to be formed Slow single pulse refers to rise and fall transition times of 100 ns minimum with a pulse width of at least 1 s These relatively s...

Page 263: ...t Vgs Id from the whole waveform 5 To ensure a determinate number of pulses are applied to the DUT the period must be set to 10 ms Wider pulse widths require a longer period If the period is too short...

Page 264: ...E LO SENSE FORCE PA CNTRL KEITHLEY 4210 SMU SENSE LO SENSE FORCE PA CNTRL KEITHLEY KEITHLEY Channel 1 Channel 2 Ext Trg Ext Clk NOTE Use torque wrench to tighten SMA connections to 8 inch lbs Scope Ca...

Page 265: ...ual Section 3 Common Device Characterization Tests Figure 3 128 Single slow pulse example data plot 0 0 0 50 100 150 200 250 300 350 400 450 1nm Chem Ox 3 5 nm HfSixOy nFET W L 10 1mm Vd 40mV PW Drain...

Page 266: ...This page left blank intentionally 3 160 Return to Section Topics 4200 900 01 Rev K February 2017 Section 3 Common Device Characterization TestsModel 4200 SCS User s Manual...

Page 267: ...ptions 4 22 Running the test sequence 4 25 Test data 4 26 Running individual plans or tests 4 27 How to control an external pulse generator 4 27 Test system connections 4 28 KCON setup 4 28 Open the i...

Page 268: ...07 GND 3 cable 4 Keithley Model 4200 MTRX X cables 0 if using preamps 8 Keithley Model 4200 TRX X cables 11 if using preamps 2 Keithley Model 7007 GPIB cables 1 Keithley Model 236 ILC 3 safety interlo...

Page 269: ...TE user test module UTM and connect it to the user module Once this user module is connected to the UTM the following occurs each time KITE executes the UTM KITE dynamically loads the user module and...

Page 270: ...r ki590ulib Model 4200 SCS Reference Manual ki595ulib Model 595 Quasistatic CV Meter Instruction Manual document number 595 901 01 ki82ulib Model 4200 SCS Reference manual Hewlett Packard Model 4284 L...

Page 271: ...m these configurations using the Keithley CONfiguration utility KCON Figure 4 3 provides an overview of KCON features For details about using KCON refer to the Reference Manual Keithley CONfiguration...

Page 272: ...CP2 and ground unit External Instruments User installed switch matrix capacitance meters pulse generators probe station test fixture and general purpose test instruments Selected instrument for which...

Page 273: ...on problems Applies to all instruments except probe stations test fixtures and general purpose test instruments Modifies the default automatically assigned Formulator constants for newly created KITE...

Page 274: ...l the switch matrix When a test sequence for a device is started the UTM will close the appropriate matrix crosspoints to connect the specified instrument terminals to the appropriate test system pins...

Page 275: ...e For additional information about KCON refer to the Reference Manual Keithley CONfiguration Utility KCON page 7 1 Similarly for additional information about switch matrix configuration and usage refe...

Page 276: ...switch card to the system configuration 5 Select the KI 7174 Matrix Card CARD1 item in the configuration navigator Connect the SMUs GNDU and test fixture pins as indicated in Figure 4 7 using the pull...

Page 277: ...2 Save the system configuration Open KITE and the ivswitch project To open KITE and the ivswitch project 1 On the desktop double click the KITE icon to open KITE 2 Open the ivswitch project from the F...

Page 278: ...the beginning of each device test sequence A test sequence for a device is executed by selecting the device plan and then clicking the green Run button When a device plan is started the connect test c...

Page 279: ...Model 4200 SCS Figure 4 16 Signal paths for 2 wireresistor tests Figure 4 17 Signal paths for diode tests Figure 4 18 Signal paths for capacitor test 1 2 3 4 5 6 7 8 9 10 11 12 A B C D Resistor SMU1...

Page 280: ...le and the user module will be executed User libraries and user modules are created and managed using the Keithley User Library Tool KULT For more information about user libraries refer to the Referen...

Page 281: ...to control a probe station to test five identical sites or die or reticles on a sample wafer Each wafer site has two subsites or test element groups At each subsite there are two devices or test eleme...

Page 282: ...n is provided with the 4200 SCS to facilitate prober control This generic prober user library developed and maintained by Keithley Instruments allows KITE to control all supported probers in the same...

Page 283: ...ary can be executed the probe list must be created using the appropriate prober control software Helpful instructions for creating the probe list for each supported prober are included in the Referenc...

Page 284: ...B bus For connection details as well as information about the KCON utility refer to the Reference Manual Keithley CONfiguration Utility KCON page 7 1 Figure 4 22 System configuration for the probesubs...

Page 285: ...e Start menu and select Start Programs Keithley KCON 2 Add the Keithley Model 707 707A Switching Matrix to the system configuration using the KCON Tools menu as illustrated in Figure 4 23 Figure 4 23...

Page 286: ...pins to the switch matrix by selecting the KI 7174 Matrix Card CARD1 in the configuration navigator and configuring it as illustrated in Figure 4 26 Detailed information about switch matrix configura...

Page 287: ...structions for each supported prober are included in the Reference Manual Using a Probe Station Appendix G Refer to Table 4 2 for additional information This tutorial uses a manual probe station howev...

Page 288: ...in Figure 4 29 set up the project plan as follows and click the Apply button at the bottom right hand corner of the window 1 Enable Project Initialization Steps 2 Enable Project Termination Steps 3 S...

Page 289: ...e prober to next subsite Connects the SMUs to the probes for the N channel MOSFET see Figure 4 31 Generates a family of curves ID vs VD for the MOSFET Connects the SMUs to the probes for the NPN trans...

Page 290: ...or SMU1 Gate Source Drain Bulk N Channel MOSFET 1 2 3 4 5 6 7 8 9 Columns Rows A B C D SMU2 SMU3 GNDU NPN Transistor Base Emitter Collector Matrix Card Pin 3 Pin 4 Pin 5 Pin 6 Pin 7 Pin 8 Pin 9 Wafer...

Page 291: ...probesubsites in the KITE project navigator to select the project 3 Click the green Run button to execute the test sequence NOTE Because a manual probe station is being used the prober will not actual...

Page 292: ...a test is opened by double clicking it in the project navigator Test data is viewed by clicking the Graph or Sheet tab for the test When you double click a test to open it its test data corresponds to...

Page 293: ...of Site 2 Make sure the prober pins are making contact with the subsite pads 2 Set the site navigator to Site 2 3 In the project navigator click 3terminal npn bjt for Subsite2 to select the device pla...

Page 294: ...Figure 4 38 Test system for ivpgswitch project KCON setup For this tutorial a Hewlett Packard Model 8110A 81110A pulse generator Keithley Instruments Model 707A Switching Matrix Keithley Instruments M...

Page 295: ...in Figure 4 39 Figure 4 39 Adding a pulse generator 3 Set the GPIB Address for the pulse generator by selecting it in the configuration navigator and entering the appropriate GPIB Address on the Prop...

Page 296: ...uration it must be removed before the probe station can be added To remove any external component from the system configuration select it in the configuration navigator and press the DELETE key Figure...

Page 297: ...onnecting the switch matrix 8 Save the configuration using the KCON File menu as illustrated in Figure 4 45 Figure 4 45 Saving the system configuration Open the ivpgswitch project Open the ivpgswitch...

Page 298: ...cts to the SMUs as shown in Figure 4 48 For details about the connect UTM refer to the Reference Manual Appendix A Creating Project Prompts Figure 4 47 First connect test Connects the device to the SM...

Page 299: ...re different you will have to change the connection parameters in the UTM to match them Figure 4 49 Second connect test connects the device to the PGU Figure 4 50 Signal paths to apply the pulse stres...

Page 300: ...navigator double click pgu trigger to open the test The two line parameter list for this test is shown in Figure 4 53 This test triggers the PGU to output 60 000 pulses to the N channel MOSFET Figure...

Page 301: ...X is located at the top right corner of the project navigator Figure 4 54 shows the button to reduce the size of the test documents in the workspace Figure 4 54 Buttons to close or reduce size of tes...

Page 302: ...r that there is a separate graph menu and axis properties window for each graph Figure 4 56 Graph scale settings 4 Compare graphs Visually inspect the two graphs for differences caused by the stress Y...

Page 303: ...indow 7 In the graph definition window click the Y1 DrainI AS cell and the Y2 GM AS cell to select them and click Ok The graph will now show the overlaid data 8 From the graph menu use the Legend and...

Page 304: ...the 4200 SCS system configuration KCON is used to add external equipment to the test system For details about KCON refer to the Reference Manual Keithley CONfiguration Utility KCON Section 7 To add th...

Page 305: ...new project To create a new project 1 On the KITE toolbar select New Project from the File menu see Figure 4 62 to open the define new project window The new project definition window is shown in Fig...

Page 306: ...new project Add a subsite plan A subsite or test element group is a collection of devices to be tested To add a subsite plan 1 Open the Add New Subsite Plan to Project window by clicking the Add new S...

Page 307: ...Plan item on the Project menu see Figure 4 66B Figure 4 66 Add a new device plan to a KITE project 2 In the window to add a device plan Figure 4 67A double click the Capacitor folder to open it and t...

Page 308: ...n it and display the available tests for that device Figure 4 69A shows the Capacitor folder opened 4 For the Capacitor folder click cvsweep to select it Figure 4 69 shows cvsweep selected 5 Click Cop...

Page 309: ...anges to the test NOTE For details about the cvsweep UTM refer to the Reference Manual Open and execute cvsweep UTM page C 11 Executing the test Since this new project has only one subsite plan and on...

Page 310: ...a dedicated PC Its interactive test environment KITE allows users to use the 4200 SCS both as a parameter analyzer and an external instrument controller making it a command and control center of the e...

Page 311: ...ection Keithley Pulse Application KPulse 5 2 KPulse Getting started 5 2 Starting KPulse 5 2 KPulse setup and help 5 3 Triggering 5 3 Standard pulse waveforms 5 4 Segment ARB waveforms 5 6 Exporting Se...

Page 312: ...hannel pulse cards The 4225 PMU is identified as PMU on the card tab whereas all other card types are identified as VPU Starting KPulse Open the KPulse GUI Figure 5 1 by double clicking the KPulse ico...

Page 313: ...ter or select None if you are not using a trigger master see the Reference Manual Triggering page 5 3 Help Use this menu to access Model 4200 SCS Complete Reference information and to open the About K...

Page 314: ...ut Standard pulse waveform previewers KPulse provides a preview of configured standard pulse waveforms for each enabled channel Each waveform previewer shows the high and low levels and timing for the...

Page 315: ...urned on step 9 pulse output updates immediately when settings are changed OR Click the Apply Settings button to manually apply settings This button is disabled when Apply Changes Immediately is enabl...

Page 316: ...output values remain the same as the final value reached in the last segment Start stop and time restrictions The start level of the first segment and the stop level of the last segment must be the sa...

Page 317: ...Polarity Positive or Negative Select Apply Changes Immediately to automatically apply settings and update the previewer OR Click the Apply Settings button to manually apply settings and update the pr...

Page 318: ..._arb ksf waveform file can be imported back into the pulse generator card using the seg_arb_file function see Reference Manual seg_arb_file page 8 176 For Segment ARB stress measure testing the ksf fi...

Page 319: ...opy the waveforms into the Sequencer for Channel 1 Channel 2 or both The order that two or more waveforms appear in a channel sequencer is the order that the waveforms will be output by that channel R...

Page 320: ...m Arb file operation Copy waveforms into Sequencer 1 Click the Arb Generator tab 2 Configure Graph Settings for the previewer Select Scratchpad or Sequencer Scratchpad previews the waveform that is se...

Page 321: ...kaf files are saved in a folder named ArbFiles at the following path C S4200 kiuser KPuIse ArbFiles Use Save As to name the file and save it After any subsequent changes click Save to overwrite the ka...

Page 322: ...red Clicking the red box turns off the outputs of all pulse cards Waveform types KPulse provides the following fundamental waveform types to use as the building blocks for custom file arb Sine wavefo...

Page 323: ...not already used in the Scratch Pad After changing one or more settings click Preview to display the waveform Clicking Ok places the waveform in the Scratch Pad Figure 5 11 Square waveform default set...

Page 324: ...import the file into the Waveform Generator After importing the file click Preview to show the waveform Clicking Ok places the waveform in the Scratch Pad Figure 5 13 Custom waveform Creating a file...

Page 325: ...er KPulse ArbFiles Calculation waveform An example of a calculation waveform is shown in Figure 5 15 The waveform for this example is named CALC1 but can be any name that is not already used in the Sc...

Page 326: ...veform for this example is named GAUSSIAN1 but can be any name that is not already used in the Scratch Pad After changing one or more settings click Preview to display the waveform Clicking Ok places...

Page 327: ...The waveform for this example is named SEQ1 but can be any name that is not already used in the Scratch Pad A sequence waveform consists of the waveforms that are present in the Channel 1 or Channel...

Page 328: ...5 18 Return to Section Topics 4200 900 01 Rev K February 2017 Section 5 How to Generate Basic Pulses Model 4200 SCS User s Manual...

Page 329: ...transistor 4 24 connect test 4 14 Connecting Devices Under Test DUTs 1 36 Connecting the switch matrix 4 20 4 31 Connections 3 9 Contents of the Keithley Device file new mosfet kdv 2 28 Controlling a...

Page 330: ...t filter 1 30 Installation Environmental requirements 1 4 Operating environment 1 4 Cleanliness 1 5 Proper ventilation 1 4 Temperature and humidity 1 4 Shipping and storage environment 1 4 Powering th...

Page 331: ...ator ivpgswitch project 4 31 Project Navigator ivswitch project 4 11 Project Navigator probesubsites project 4 21 Project Navigator Checkboxes 2 21 Pulse generator card 1 20 Pulse generator configurat...

Page 332: ...tted 2 46 Subsite Settings window Cycle Mode 3 95 Stress Measure Mode 3 96 Subsite Setup tab 3 69 Supplied 3 31 Supplied interconnect parts 3 30 Supported external equipment table 4 4 Supported prober...

Page 333: ...4200 900 01 Rev K February 2017 Index 5 Index Model 4200 SCS User s Manual W What if my equipment is not listed in KCON 4 44 What is the PIV A PulseIV Package 3 29...

Page 334: ...Index 6 4200 900 01 Rev K February 2017 Model 4200 SCS User s Manual Index...

Page 335: ...operty of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 44...

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