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4200-900-01 Rev. K / February 2017
Section 4: How to Control Other Instruments with the Model 4200-SCS
Model 4200-SCS User Manual
Connections
Connection details for the Model 590 CV Analyzer are provided in the
Appendix C, Using a Keithley Instruments Model 590 CV Analyzer
. The INPUT and OUTPUT
connectors of the 590 are connected to the capacitor using 4801 (RG-58) BNC cables. The 590 is
controlled by the 4200-SCS through the GPIB bus. Use a 7007 GPIB cable to connect the 590 to
the 4200-SCS.
provides an illustration of these connections.
Figure 4-58
Keithley Model 590 CV Analyzer DUT connections
KCON setup
For this tutorial, the 590 CV Analyzer must be included in the 4200-SCS system configuration.
KCON is used to add external equipment to the test system. For details about KCON, refer to the
Reference Manual, Keithley CONfiguration Utility (KCON), Section 7
.
To add the 590 to the system configuration using KCON:
1. Start KCON. Double-click the
KCON
icon or use the
Start
menu,
Start > Programs >
Keithley > KCON
.
2. Add the Keithley Instruments Model 590 CV Analyzer to the system configuration using the
KCON Tools
menu as illustrated in
.
Figure 4-59
Adding a 590 CV Analyzer to the system configuration
3. Set the GPIB address for the 590 by selecting the
KI 590 CV Analyzer - CMTR1
in the
configuration navigator and entering the appropriate GPIB address on the Properties &
Connections tab. This is illustrated in
Metal/polysilicon
Gate oxide
Silicon substrate
590 CV Analyzer
INPUT
OUTPUT
BNC
connectors
Wafer
BNC
cables
Faraday Shield
GPIB
To the
42
00-SCS
Probe station
chuck
Summary of Contents for 4200-SCS
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