Keithley 4200-SCS, User Manual

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4200-900-01 Rev. K / February 2017 Return to Section Topics 4-15
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS
Figure 4-20
Connect parameters for 4terminal-n-fet device
NOTE
If a pin parameter is < 1, the terminal-pin-pair is ignored and no matrix connections are
made.
How to control a probe station
This tutorial demonstrates how to control a probe station to test five identical sites (or die or
reticles) on a sample wafer.
Each wafer site has two subsites (or test element groups). At each subsite there are two devices
(or test elements) to be tested:
• 4-terminal N-channel MOSFET
• 3-terminal NPN transistor.
The subsites need not be identical, but for simplicity they are assumed to be the same. This is
illustrated below in
Figure 4-21 .
Connects SMU1 to pin 3 of test fixture
Connects SMU2 to pin 4 of test fixture
Connects SMU3 to pin 5 of test fixture
Connects GNDU to pin 6 of test fixture
1
Opens all relays