
PlasmaQuant MS Series
Figures and Tables
221
Tables
Table 4 - Sample introduction PCB diagnostic LED identification ................................. 43
Table 7 - Example of motor steps relative to position (mm) for depth mechanism .... 65
Table 8 - Example of motor steps relative to position (mm) for vertical mechanism .. 66
Table 9 - Example of motor steps relative to position (mm) for horizontal mechanism
Table 15 - Thermistor results and possible causes for spray chamber fault monitoring
Table 18 - LED Summary on ion optics and HV supply board ...................................... 199