
Gas
Control System
PlasmaQuant MS Series
34
5
Gas Control System
This chapter describes the operation and maintenance of the instrument gas control
system. A few notes on where to find information:
A majority of the gas control system hardware is contained in the instrument gas
box assembly. The gas box also contains some of the sample introduction
hardware, in particular, the Assy PCB Sample Introduction.
Information provided in this section relating to the gate and isolation valves refers
only to the gas control system components.
Information about iCRC gas control, previously contained in the service addendum
has been consolidated and added to this section. All of the hardware for iCRC gas
control is located in the iCRC gas box.
5.1
System Description
The gas control system has two parts:
Instrument Gas Control
iCRC Gas Control
5.1.1
Instrument Gas Control
The gas control system hardware is contained in the gas box assembly located in the
upper rear right corner of the RF door assembly.