PlasmaQuant MS Series
Plasma
Generation
85
5.
Carefully lower the drive mechanism out of the RF enclosure.
6.
When replacing the drive mechanism, be sure to extend the drive to about 50%
of its overall range so the firmware can calibrate the opto circuitry to the home
position during re-initialization.
NOTICE
You will need to insure the new drive mechanism is sealed into the RF enclosure so
in the event of a water leak, water cannot flood into the electronics below the RF
enclosure. Please use a silicone-based sealant to perform this function.
6.5.11
Removing the Z-axis drive mechanism
This section provides information on how to remove the Z-axis drive mechanism. It is
assumed that you have already removed the translator platform. For instructions on
removing the translator platform, please refer to section 6.5.8, page 81.
1.
Remove the instrument cover from the main RF door assembly and locate the Z-
axis drive mechanism.
Figure 6-33 - Z-axis drive mechanism
2.
Open the plasma compartment door and locate the stepper motor mounting
screws.
3.
Loosen the stepper motor and remove the drive belt.
4.
Remove the four mounting screws and slowly pull out the drive mechanism.
5.
The plug for the opto circuit may be plugged directly into the filter board PCB.
Unplug the drive and remove it from the instrument.
6.
When replacing the drive mechanism, be sure to extend the drive to about 50%
of its overall range so the firmware can calibrate the opto circuitry to the home
position during re-initialization.
6.5.12
Replacing the DC Supply Module
Locate the DC supply module on the inside of the main RF door assembly (above the
RF enclosure and to the left of the gas box assembly). There are no serviceable parts