Plasma
Generation
PlasmaQuant MS Series
82
Figure 6-29 - Cables and water connections on back of RF Generator mounting plate
5.
Using a 3 mm Allen key, loosen the hex screws securing the z-axis drive to the
back platform rail. The screws can be accessed through the mesh below the RF
enclosure filter assembly. Be sure to not remove the screws completely.
6.
While accessing from the plasma compartment door opening, gently lift the
back of the translator table off the z-axis rail.
7.
Move the translator table slightly forward (towards the plasma compartment
door opening) and up to remove it from the y-axis drive mechanism.
8.
Remove the RF mounting plate and translator platform together through the
plasma compartment door opening. Be careful to not damage any cables.
9.
Disconnect the two connections underneath the translator platform (Figure