Gas
Control System
PlasmaQuant MS Series
52
5.5.6
Checking Plasma Gas Flows
Figure 5-18 - Connection of Rotameter to plasma gas port within RF enclosure
To check the plasma gas flows:
1.
Connect a 0–40 L/min flow meter to the plasma outlet (lower outlet) inside the RF
enclosure.
2.
As shown in the photo, the rotameter tubing must be passed through the RF
enclosure front opening to be accessed by the outside, as the RF door must be
closed to activate the flows within the plasma tab at the instrument setup.
3.
In the software, go to the diagnostics module and select the
Plasma
Status/Contro
l page.
4.
Check that each increment of the plasma flow (1.5, 3, 6 and 12 L/min) is within
tolerance.
Figure 5-19 - Plasma gas adjustment within service mode
NOTE
Any combination of gas flows should be within ±15% of the desired flow. The
plasma gas flows cannot be recalibrated. Allowing the gas to pass through
restrictors, with different orifice sizes, controls these flows. The solenoids and the
orifices or “jewels” are available as spare parts. Cleaning or changes must only be
carried out by experienced service engineers.