
PlasmaQuant MS Series
Electronics
175
It is labeled as G2 and is optional for service.
Figure 10-2 - Penning vacuum gauge (G2)
The loom, connected directly to the system control PCB also facilitates a spare
gauge, can be fitted to VC2 or VC3 for diagnostic purposes such as leak checking.
The Penning gauge measures vacuum pressures between the ranges of 2x10
-03
Torr to 1x10
-08
Torr.
Vacuum pressure in VC2 is monitored and is referred to in the software as GMain
(TTR 91).
The loom is connected to the systems control PCB and terminated at the gauge
with an RJ45 connector.
Figure 10-3 – Thermo VAC gauge (GMain)
Is responsible for venting the vacuum system in circumstances where the
instrument power or Argon gas supply has failed.
It consists of a +24 V normally open solenoid. In the event of an instrument power
failure the solenoid will open and vent the vacuum system to atmosphere via a
sintered filter.
The Penning vacuum
gauge:
The Thermo VAC Gauge:
The vacuum vent device: