PlasmaQuant MS Series
Vacuum
System
91
Figure 7-2 - Vacuum housing and interface assemblies.
VC1 is the volume between the sampler cone and the skimmer cone, and forms part of
the interface assembly. When the gate valve is closed, VC1 is isolated from the other
two vacuum chambers. The gate valve enables the vacuum system to pump while the
plasma is off. This minimizes contamination, which facilitates a cleaner vacuum
system and shorter warm-up time.
Figure 7-3 - VC1 is the volume between the sampler and skimmer cones