
Power
Supply
PlasmaQuant MS Series
196
For example, the extraction lens E1 regulator has the nominal range of 0 to -1 kV, but
under some single fault conditions its output may be stuck to 55 V positive rail
or -1.2 kV negative rail.
The actual voltage range may slightly exceed the nominal range, but by no more than
a few volts under correct operation. In the case of a short connection of two or more
ion optics electrodes, the actual output may significantly exceed the nominal voltage.
The adjustment step defines the smallest discrete change that can be made by a
regulator and it is obtained by dividing max nominal voltage with 4096 (12-bit
resolution). It is a theoretical value only, the actual value may be higher, but should
not exceed twice the stated value.
The ripple is specified as peak value, which may be the same over the entire range, i.e.,
it may not be proportional to the actual voltage output value. It is important to
understand ripple as a periodic signal with approximately fixed amplitude and wave
shape which is mainly caused by the DC/AC inversion. It should not be interchanged
with noise, which is of the random nature.
The output noise is caused by the internal noise sources of the used electronic
components and external interference sources of random or pseudorandom nature.
The nominal output current is the maximum current expected under normal operating
conditions (e.g. no excessive leakage due to arcing, short connections or other
abnormal causes). In a case of an abnormal event, the output current may be higher,
but the output voltage will likely drift from its nominal value.
Settling times describe the dynamics of the output section under step excitation. The
actual settling times may be considerably longer (exceeding 50 ms), because of
different excitation waveforms and limits imposed by the protective circuits (e.g. due
to DC/AC inverter internal current/power limiting). Further, they are defined for
nominal conditions only and that excludes response in a case when the detector
protection is activated.
This column defines which electrodes and in which manner respond when detector
overload protection is required. N/A indicates that the electrode settings are not
affected with the protection, i.e. previous settings are preserved. Separate control is
required for each electrode. Recovery refers to the time taken for the detector focus
output to return to its set point once protection is disabled.
Electrode/lens
Range
Adjustment
Ripple
Nominal
current
Settling
times
Detector
protection
Skimmer Cone
0 →+22V
5mV
±
5mV
15mA
≥35ms
N/A
Extraction E1
-
1kV →+0V
245mV
±
10mV
100uA
≥35ms
N/A
Extraction E2
-
1kV →+0V
245mV
±
10mV
100uA
≥35ms
N/A
Extraction E3
-
1kV →+0V
245mV
±
10mV
100uA
≥35ms
N/A
Corner CE
-
1kV →+0V
390mV
±
10mV
100uA
≥35ms
N/A