Mass
Spectrometer
PlasmaQuant MS Series
116
Figure 8-4 - Vacuum page with plasma on and gate valve open
At this pressure, ions can be guided by electrostatic fields generated by the ion optics.
Neutral gas molecules, on the other hand, diffuse into the vacuum chamber and are
pumped away.
Turbo1 is mounted with two screws to the interface assembly. Removing the turbo1
exposes the corner lens, mirror lenses, entrance lenses and the gate valve mechanism
for maintenance.
The final stage of the vacuum system (VC3), containing the mass analyzer and the
detector, is maintained at a pressure (Gauge 2 on VC3) of around 1 x 10
-7
Torr by
turbo2 with gate valve closed.
Figure 8-5 - View of VC1, VC2, and VC3