Plasma
Generation
PlasmaQuant MS Series
80
6.5.7
Removing RF Enclosure Filter Assembly
The RF filter feedthrough assembly routes all of the LVDC control signals and supplies
required for operation of the RF generator, oscillator bias and XYZ translation
mechanism into the RF compartment.
NOTE
No calibrations are required on replacement of this assembly.
Before you begin:
1.
Turn the instrument power switch off and disconnect the main power cable from
the supply.
2.
Turn the water chiller off.
3.
Remove the rear panel of the instrument main RF door to expose the rear of the
RF enclosure (Figure 6-27).
Figure 6-27 - Rear of RF enclosure showing RF Filter assembly
4.
Disconnect the six connectors on the rear panel of the RF enclosure (RF
enclosure filter assembly).
5.
Remove all the screws securing the RF enclosure filter assembly (Remove only
14 outer screws, and not the 3 inner screws).
6.
Pull the RF enclosure filter assembly out slightly to expose the connectors on the
inside of the filter assembly.
7.
Disconnect the cable connectors from the translator and RF generator
assemblies.
8.
Remove the RF enclosure filter assembly from the RF enclosure.