
Gas
Control System
PlasmaQuant MS Series
58
Figure 5-24 - Removing iCRC box assembly cover
1.
Disconnect the pressure sensor cable from the sensor (Figure 5-25).
2.
Remove the pressure sensor by hand or by gently using pliers.
3.
Replace in reverse of removal.
Figure 5-25 - iCRC helium and hydrogen pressure sensors
Inspect the O-rings located on the iCRC solenoid valves and replace if required (Figure
5-26). Ensure that the iCRC block is free from scratches and debris, and that a proper
seal is formed between the solenoid O-rings and the block.
Inspecting the O-rings on
the iCRC Solenoid Valves