Chapter 3 - Module Specifications
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MNL000531
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
3
-
2
System Specifications
Range of Environmental Conditions
-20 to 60° C Operating Temperature Range
95% Maximum Relative Humidity
2000 Meters Above Sea Level, Maximum
Paint Specification
The paint specification for touch up painting of all enclosure cabinets:
Touch-up paint for the cabinet can be purchased from Sherwin Williams. The paint is from Sherwin
Williams Polane S Plus White textured blending FG3W25.
Pressure
MAWP of the piping systems within the module are as follows:
High pressure process piping, from PT-1 to PCV-1, purge inlet CV-9/CV4 to V-13, and
V-13 to MV29.
o
Process gases: Silane (SiH
4
), nitrous oxide (N
2
O), nitrogen trifluoride (NF
3
), and
carbon dioxide (CO
2
): 3000 psig MAWP.
o
Process gases: Hydrogen chloride (HCl): 1300 psig MAWP.
o
Process gases: Ammonia (NH
3
): 250 psig MAWP.
o
Other gases: contact your Versum Materials, Inc. representative
Low pressure process piping from PCV-1 to MV-38.
o
Process gases: All: 250 psig MAWP.
