Chapter 1 - Safety Warnings
_______________________________________________________________________________________________________________
MNL000127
Revision 8
07/27/2016
Gas Equipment
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
1
-
18
A list of most of the oxidizers used in the GASGUARD® system follows:
Chlorine
Nitrogen trifluoride
Chlorine trifluoride Nitrous oxide
Fluorine
Oxygen
1.10.5 Inert Gas Hazards
High concentrations of nitrogen, helium, or
other inert gases will cause an oxygen deficient
atmosphere in a confined area which can cause
DEATH. All personnel must read and
understand the Material Safety Data Sheet(s)
(MSDS) for the specific gas(es) being used.
Oxygen concentrations of 19.5% or less can greatly increase the hazard of asphyxiation to personnel.
Before working in an area where nitrogen, helium or other inert gases could be present, check the area
with an oxygen monitor to be sure the oxygen concentration is between 19.5% and 23%. While
working in the area, the oxygen concentration needs to be monitored with a continuous oxygen
monitor. Always provide adequate ventilation in the work area to decrease the risk of an oxygen
deficient atmosphere.
Read VERSUM MATERIALS, INC. Safetygram 17 "Dangers of Oxygen
Deficient Atmospheres" included in the safety literature in Section 1.14 of this manual.
Any time an oxygen deficient atmosphere is suspected, the proper personal protective equipment must
be used. See the information on personal protective equipment in Chapter 1 Section 9 for details.
Personnel in an oxygen deficient atmosphere will not realize they are being asphyxiated. Breathing of
pure inert gases will cause immediate unconsciousness.
Symptoms of asphyxia include:
Rapid breathing
Nausea
Vomiting
Inability to move
Convulsive movements
Collapse
Abnormal pulse
