Chapter 8 - Operating Procedures
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MNL000536
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
8
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1.0
Emergency Stop
1.
In the event of an emergency that requires the entire system to be shut down
the remote
emergency stop button or the Emergency Off Button at the AP11 controller on the BSGS eV /
BULKGUARD eV module should be pushed
. It is strongly recommended that the module have
at least one remote emergency stop button located at the perimeter of the pad. Depressing the
emergency stop button will stop the flow of gas at the source and shutoff power to the JT heater.
Note: The “Emergency Stop” (E-Stop) circuit closes all automatic valves and sounds the alarm horn.
2.
Evacuate the area.
The Emergency Stop (E-Stop) button may be used at any time to shut down the module if any
emergency condition is observed.
WARNING
Pressing the Emergency Stop button does not disconnect power to the controller.
Heater Power (208-240VAC) and optional Controller Power (100-240VAC) are
still live within the Controller. Do not perform maintenance on the Controller
without externally disconnecting or switching off power source(s) and following a
Lockout and Tagout procedure.
Note: The Emergency Stop (E-Stop)
button is located on the AP11 controller which sits above the
piping. The height of this button exceeds the SEMI standard maximum height of 64.5” (1638mm). To
change the height of this button would require a redesign of the system. The button is reachable by
90% of the population.
