Chapter 7 - System Description
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MNL000535
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
7
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23
V-113TP
is
Optional
It is the
trickle vent valve. This valve is located in the vent piping circuit,
upstream of MV-29 and the vacuum Venturi. In systems equipped with a source deep purge Venturi, a
V-113TPx may also be located on the Venturi panel. The purpose of this valve is to limit the amount
of silane vented to the customer’s abatement system. It is the customer’s responsibility to properly
construct an abatement system and recommended that the customer consult CGA G-13 to understand
and design to accommodate the hazards associated with silane. V-113TP is inhibited from opening
during the pre-purge sequence initial vent, and conditioning sequence, until pressure has decreased to
75 psig. The amount of silane vented during each operating mode can be found in the installation
section of this manual. V-113TP is standard on all silane modules.
MV-36x
is
Optional
It is the
coax fill port for process out A/B. This valve is included with the
process out coax monitoring option. It is located on a branch of the process out coaxial bulkhead,
inside the enclosure. Its purpose is to facilitate the pressurization of the coax annular space. The
annular space should be charged to a pressure above 120 psig.
MV-40x/MV-41x/MV-42x
are
Optional
– These are the isolation valves (MV-40/MV-41) and the
bypass valve (MV-42) that are installed if the process purifier option is selected. Only qualified
personnel should operate these valves.
CF-xy
is
Optional –
These are the
cylinder flags. The cylinder flags themselves are installed at the
customer site. They are activated by the software and are assigned to pneumatic actuators as per the
installation drawing in the Pneumatic Assignments section of Appendix A.
