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Chapter 1 - Safety Warnings

_______________________________________________________________________________________________________________

MNL000127

Revision 8

07/27/2016

Gas Equipment

Confidential and Proprietary Data

Page

The following label would be used with the gases listed below it:

Arsine mixtures

Germane

Carbon monoxide

Hydrogen selenide

Diborane mixtures

Hydrogen sulfide

Dichlorosilane

Phosphine mixtures

Diethyl telluride

The following label would be used with the gases listed below it:

Silicon tetrachloride

Содержание BULKGUARD eV

Страница 1: ...nc as of the revision and date shown All rights reserved Confidential and Proprietary Data Installation Operation Maintenance Manual GASGUARD AP11 BSGS eV Asia BULKGUARD eV NA EU Manual Part Number 48...

Страница 2: ...t prior written consent of Versum Materials Inc The information and data should be available only to those with a need to know Versum Materials Inc makes no representation that the information and dat...

Страница 3: ...bration In no event shall Versum Materials be liable for any incidental indirect or consequential damages in connection with the purchase or use of any Versum Materials product This warranty shall not...

Страница 4: ...0 doc Adding in Process Outlet C and D Chapter 3 Module Specifications Rev 1 MNL000531 doc Adding in Process Outlet C and D Chapter 4 Intentionally Left Blank Rev 0 MNL000532 doc Initial Release Chapt...

Страница 5: ...pendix B Spare Parts List Rev 1 MNL000540 doc Updated Electrical Spares Appendix C PED Assessment Rev 2 MNL000140 doc Updated Company Name and Logo Appendix D Pre Facilitation Checklist Rev 0 MNL00054...

Страница 6: ...ard Warnings 1 12 Section 11 Typical Minimal Lockout or Tagout System Procedures 1 22 Section 12 Safety Signs and Labels 1 27 Section 13 Equipment Safety Features 1 36 Section 14 Safety Literature for...

Страница 7: ...4C Post Purge 8 28 Section 4D Process Gas Conditioning 8 33 Section 4E Process Gas Flow 8 36 Section 4F Stop and Restart Process Gas Flow 8 39 Section 4G Idle Mode 8 45 Section 4H Manual Mode 8 46 Sec...

Страница 8: ...and Proprietary Data Page C 8 Appendix A Installation Drawing Package Appendix B Spare Parts List Section 1 Mechanical Spares APP B 2 Section 2 Electrical Spares APP B 3 Appendix C PED Assessment Appe...

Страница 9: ...ty Warnings Section 3 Inert Gas Hazards Section 4 Pressurized Fluids Gases Section 5 Electrical Hazard Section 6 Falling Equipment Hazard Section 7 Gas Cylinder Handling Hazard Section 8 Pinch Hazard...

Страница 10: ...and describe the icons found in various sections of the manual and on the equipment The hazard warning labels used in the manual will correlate with those used on the equipment 1 1 1 Level or Intensi...

Страница 11: ...he formation for explosive gas mixtures of flammable gas and air when exposed to an ignition source Pyrophoric gases which will ignite spontaneously without the presence of an ignition source when exp...

Страница 12: ...d date shown All rights reserved Confidential and Proprietary Data Page 1 4 This symbol warns of a pinch hazard This hazard exists on cabinet doors equipped with automatic closers This symbol indicate...

Страница 13: ...ator must read and understand this safety section before operating the system All operating and maintenance personnel must receive training and instruction by Versum Materials Inc All cylinder storage...

Страница 14: ...area which can cause DEATH All personnel must read and understand the material safety data sheet s MSDS for the specific gas es being used Oxygen concentrations of 19 5 or less can greatly increase th...

Страница 15: ...ed See the information on personal protective equipment in this section for details When entering a confined area or area which may contain high inert gas concentrations a Buddy System must be used On...

Страница 16: ...uipment Hazard This system is a top heavy device If it is not properly installed it could fall and injure crush or kill personnel working in the area When moving and installing the system extreme care...

Страница 17: ...ing and qualifications The minimum personal protective equipment required for operating and maintaining the GASGUARD system is dependent on the hazard category of the gas es being used When a gas meet...

Страница 18: ...to understand the hazards and use the proper personal protective equipment may cause INJURY or DEATH Contact Versum Materials Inc for the gas category Personal Protective Equipment for the gas categor...

Страница 19: ...gases Versum Materials Inc recommends the use of both It is not required to use both however at least one MUST be used at all times Personal Protective Equipment for Pyrophorics Pyrophoric gas leak d...

Страница 20: ...warnings The hazard warnings include Toxic Gases Hazards Corrosive Gases Hazards Flammable and Pyrophoric Gases Hazards Oxidizer Hazards Inert Gas Hazards Pressurized Gases Cylinder Handling Hazards...

Страница 21: ...rning sensations and shortness of breath to alert personnel of exposure to toxic levels Personal protective equipment required for use with toxic gases is detailed in Chapter 1 Section 9 of this manua...

Страница 22: ...use severe irritation of the eyes and respiratory system At higher concentrations they can cause severe personal injury or death Chapter 1 Section 9 of this manual lists the personal protective equipm...

Страница 23: ...it LEL and below the upper explosive limit UEL for that specific gas Some flammable gases may accumulate as pockets in enclosed areas and subsequently explode if an ignition source is present A flamma...

Страница 24: ...tmosphere Personal protective equipment required for use with pyrophoric and flammable gases is listed in Chapter 1 Section 9 Note that the personal protective equipment PPE for pyrophorics differs fr...

Страница 25: ...or the Compressed Gas Association to order CGA Pamphlets Maintain oxygen cleanliness at all times All equipment and piping in contact with oxygen or oxidizers must be cleaned to specifications outlin...

Страница 26: ...rsonnel Before working in an area where nitrogen helium or other inert gases could be present check the area with an oxygen monitor to be sure the oxygen concentration is between 19 5 and 23 While wor...

Страница 27: ...HA 1910 146 Confined Space Guidelines must be met when working with inert gases in confined spaces Self contained breathing apparatus is required cartridge or filter type gas masks cannot be used See...

Страница 28: ...nt or a ruptured failed component can expose the operator to a high pressure gas stream or projectile Read the cylinder handling warnings in Chapter 1 Section 1 10 7 and the safety literature on cylin...

Страница 29: ...r death Do not rotate the cylinder using the cylinder valve handle This may open the cylinder valve and cause a high pressure gas leak NEVER replace the gas specified for use in the source system with...

Страница 30: ...he purge gas system incorporates a pressure indicating gage which will provide the means of displaying a low purge gas cylinder pressure condition usually 200 psig 14 barg minimum The cylinder should...

Страница 31: ...nes or equipment or there is a single power source For a more complex system a more comprehensive procedure will need to be developed documented and utilized Lockout or Tagout Procedure for Name of Co...

Страница 32: ...cted employees that a lockout or tagout system is going to be utilized and the reason therefore The authorized employee shall know the type and magnitude of energy that the machine or equipment utiliz...

Страница 33: ...tagout devices Operate the energy isolating devices to restore energy to the machine or equipment Procedure Involving More Than One Person In the preceding steps if more than one individual is requir...

Страница 34: ...such operation could cause injury to personnel Do not attempt to operate any switch valve or other energy isolating device where it is locked or tagged Entry No Description 1 Name of Company 2 Type s...

Страница 35: ...__________________________________ MNL000127 Revision 8 07 27 2016 Gas Equipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 27...

Страница 36: ...ller This label is required if the GASGUARD Source System is located in a Class I Division II rated area United States or in a Group 2 Category 3 ATEX rated area Europe Acetylene systems will have the...

Страница 37: ...ific to the gases being used They are located on the door of the GASGUARD cabinet They are identical to the labels on the process gas cylinder in the GASGUARD cabinet to provide verification that the...

Страница 38: ...uipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 30 The following label would be used with the gases listed below it The foll...

Страница 39: ...Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 31 The following label would be used with the gases listed below it Acetylene Hydrogen mixt...

Страница 40: ...Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 32 The following label would be used with the gases listed below it Arsine mixtures Germane Carbon m...

Страница 41: ...___________________________________________ MNL000127 Revision 8 07 27 2016 Gas Equipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data P...

Страница 42: ...nfidential and Proprietary Data Page 1 34 The following label would be used with the gases listed below it Ammonia Halocarbon 125 Argon Halocarbon 128 Carbon dioxide Halocarbon C141B Halocarbon 11 Hal...

Страница 43: ...________________ MNL000127 Revision 8 07 27 2016 Gas Equipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 35 The following labe...

Страница 44: ...am Excess flow sensors are installed when required to shut off the flow of gas in the event of downstream equipment failure An exhaust monitor verifies ventilation through the cabinet The system may u...

Страница 45: ...127 Revision 8 07 27 2016 Gas Equipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 1 37 A password security system prevents unaut...

Страница 46: ...TERIALS INC Safetygram 11 Emergency Action in Handling Leaking Compressed Gas Cylinders VERSUM MATERIALS INC Safetygram 14 Don t Turn a Cylinder into a Rocket VERSUM MATERIALS INC Safetygram 15 Cylind...

Страница 47: ...V Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 1 Chapter 2 Installation Section 1 Receiving Inspection Section 2 Unpacking and Ha...

Страница 48: ...red are accurately shown on the shipping manifest Look for signs of any damage that may have occurred during shipment Note on the bill of lading any manifest discrepancies and any significant crate da...

Страница 49: ...amage observed on the equipment must be immediately reported to the shipping company and to the Versum Materials Inc factory 2 Using a forklift lift the equipment off the crate and carefully set it on...

Страница 50: ...ot be installed in direct sunlight Heat from solar gain is the primary reason for increased electrical enclosure temperature Overexposure to high temperature over time will reduce component longevity...

Страница 51: ...cal paint supplier The Paint Specification is included in Chapter 3 Module Specifications 9 Supporting the source container piping and source container ventilation duct is the responsibility of the ow...

Страница 52: ...________________________________________________________________________________ MNL000530 Revision 1 03 15 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights...

Страница 53: ..._________________________________________________________________________________ MNL000530 Revision 1 03 15 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights...

Страница 54: ...the maximum amount of gas required by the process system Tubing is normally constructed of 316L stainless steel but is Hastelloy C 22 on Hydrogen Chloride HCl modules All piping must be installed in a...

Страница 55: ...st be capped if they are not facilitated at the customer site Purge and High Pressure Leak Check HPLT Gas Inlet 1 4 6 4 mm diameter 0 035 0 9 mm wall thickness Venturi inlet 1 4 6 4 mm diameter 0 035...

Страница 56: ...minates as a branch on the coaxial bulkhead inside the enclosure On the branch of the coaxial bulkhead inside the enclosure a pressure switch and manual isolation valve is installed to facilitate the...

Страница 57: ...106 127 CFH 50 60 LPM of nitrogen is also being sent into the line through the vacuum Venturi loop The purging sequences typically run approximately 30 45 minutes Process gas is also introduced durin...

Страница 58: ...2 lb NH3 6 lb NF3 8 lb N2O 7 lb HCl 8 lb CO2 A nitrogen trickle purge is constantly bled into the vent line to maintain an inert atmosphere when hazardous gases are being used For this reason a trickl...

Страница 59: ...generator will demand a flow of 106 127 CFH 50 60 LPM of nitrogen during purge cycles Vacuum Venturi Vent Line Sizing The vacuum Venturi is extremely susceptible to vent line back pressure and cannot...

Страница 60: ...bon dioxide CO2 process gases For ammonia NH3 process gas an HPLT pressure of 190 205 psig 13 1 14 1 barg is required Sufficient over pressure protection must be provided Versum Materials Inc recommen...

Страница 61: ...re and must be located outdoors Heat Trace and Insulation All source containers that are heated including Y containers drums tonners and ISO containers must have heat trace and insulated piping at lea...

Страница 62: ...rify that the Argon pressure has been maintained at greater than or equal to 15 psig 1 bar g If positive pressure has not been maintained contact the Versum Materials Inc representative It is also rec...

Страница 63: ...with the following drawings Electrical Details for Typical Installation located in Appendix A Installation BSGS eV BULKGUARD eV Rack located in Appendix A Sealing hubs and low point drains and other m...

Страница 64: ...Supply Connection AP11 with eV ECC BSGS eV BULKGUARD eV modules are normally equipped with an eV ECC located on top of the AP11 controller When equipped with an eV ECC the BSGS eV Bulkguard eV has two...

Страница 65: ...32A 50 60Hz 3 wire Controller 100 240 VAC 150 VA maximum 50 60Hz 3 wire Power Requirements Controller Powered Separate Heat trace with no JT heater Heaters 208 240 VAC 7A 50 60Hz 3 wire Controller 10...

Страница 66: ...er Supply Connection To supply power for the AP11 controller separate from the heaters complete the following steps Remove wires between terminal blocks 1031 1121 and 1021 1111 Figure 2 8 Wire heater...

Страница 67: ...power from the unit when maintenance on the controller is required and should be Lockout Tagout capable This device should be rated as a minimum at 240 volts 4 amps 50 60 Hz and 10 000 rms symmetrica...

Страница 68: ...at least 75C rated wiring for the mains supply Field Connections In NEC Class I Division 2 areas only in the U S A a conduit seal pour fitting or equivalent must be installed between each electrical c...

Страница 69: ...the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 23 Systems which have been equipped with the eV ECC have conduit holes in the back of the sheet metal These co...

Страница 70: ..._____________________________________________ MNL000530 Revision 1 03 15 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprieta...

Страница 71: ...tial and Proprietary Data Page 2 25 Systems which do not have the eV ECC installed with have conduit holes located on top of the AP11 controller These holes would be covered up when the eV ECC is inst...

Страница 72: ...____________________________________________________ MNL000530 Revision 1 03 15 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Pr...

Страница 73: ...d the AP1571 bulk interface board located in the right bulk interface box located on the right side of the piping cabinet There are three types of I O identified for the field connections discrete dig...

Страница 74: ..._______________________ MNL000530 Revision 1 03 15 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 28 Figu...

Страница 75: ...vised inputs are digital inputs which are monitored via a window comparator These inputs are monitored for normal operation alarm type and fault conditions A normally open switch is to be used as an i...

Страница 76: ...e External I O Communications The BSGS eV BULKGUARD eV System is equipped with a vent unavailable feature which prevents process gas from being vented from the panel if the scrubber system is not oper...

Страница 77: ...hts reserved Confidential and Proprietary Data Page 2 31 Digital Outputs Dry Customer I O board AP1563 24 VDC 1 Amp maximum Relay Output NO Customer Brd COMMON NC 1 T4 1 T4 2 T4 3 2 T4 4 T4 5 T4 6 3 T...

Страница 78: ...r Brd Return Hardwire Switch Position 5 6 T9 LEFT T9 LEFT SW2 5 7 8 T9 RIGHT T9 RIGHT SW2 6 33 T7 1 T7 2 SW1 1 34 T7 3 T7 4 SW1 2 35 T7 5 T7 6 SW1 3 36 T7 7 T7 8 SW1 4 37 T7 9 T7 10 SW1 5 38 T7 11 T7...

Страница 79: ...2 Off if total number of active hardwire circuits is 1 3 5 7 9 or 11 Customer Board parity LED will be green when switches are configured correctly A digital input that is in the OPEN state and config...

Страница 80: ...his constraint is not violated The following sections provide detailed guidelines on how to connect and use the customer board There are 3 types of devices as shown in Figure 2 17 below AP11 connectio...

Страница 81: ...connected devices is less than the 200mA capacity of the Customer Board If using all 2 wire devices no calculation is required as the AP11 s capacity is sufficient for this configuration For all other...

Страница 82: ...Calculation Resistance in the cables used to connect field devices to an AP11 results in voltage drops that must be considered These voltage drops directly subtract from the power supply s output used...

Страница 83: ...e calculations confirm that the actual cable resistance 10 54 ohms is less than the Max cable resistance 290 ohms so the excitation specification is satisfied 3 Wire Device Powered from AP11 Device ha...

Страница 84: ...times the number of meters that the signal travels IMPORTANT Both the wire going to and returning from the sensor must be included Cable resistance Ohms per meter meters of cable 2 this is for wire to...

Страница 85: ...0530 Revision 1 03 15 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 39 On BSGS eV BULKGUARD eV modules j...

Страница 86: ...on to be made without having to open the controller door Electrical devices should never be operated connected to or disconnected from the USB port unless the area surrounding the equipment is known t...

Страница 87: ...psig 6 9 barg Over pressurization protection such as a safety relief valve must be provided to protect the internal solenoids The flow rate required for pneumatic valve operation is 2 CFH 1 LPM A 1 4...

Страница 88: ...depending on the tightness of the individual controller and the installation BSGS eV BULKGUARD eV will require 7 LPM 15CFH Flowrates should be monitored during Type Z purge Do not exceed 7 LPM 15 CFH...

Страница 89: ...nfiguration A GCS is typically integrated into the site s Ethernet network Figure 2 24 depicts the typical network architecture of a GCS In most instances the GCS is connected to two separate networks...

Страница 90: ...roprietary Data Page 2 44 Customer s Entire Network Other Networked Customer Computers or Equipment Residing on this Network Subnet HMI or SCADA Computer Windows NT or Windows 2000 Gasguard AP Etherne...

Страница 91: ...erly and is ready for the Operational Readiness Inspection commissioning and start up The Startup and Commissioning Checklist is included in Appendix E of this manual Operational Readiness Inspection...

Страница 92: ...LKGUARD eV controllers that have the label shown in Figure 2 25 has been certified to comply with European Union ATEX Directive 2014 34 EU of the European Parliament and Council when properly installe...

Страница 93: ...re an explosive atmosphere is unlikely to occur occurs infrequently or occurs for only a short period of time The atmosphere symbol G G means that product is safe in an explosive GAS atmosphere Symbol...

Страница 94: ...onditions When installing the equipment appropriate precautions must be taken to ensure that the equipment has been connected to earth Refer to Section 5 of this manual for more information Installati...

Страница 95: ...______________________________________________________ MNL000531 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and...

Страница 96: ...tion for touch up painting of all enclosure cabinets Touch up paint for the cabinet can be purchased from Sherwin Williams The paint is from Sherwin Williams Polane S Plus White textured blending FG3W...

Страница 97: ...2242 mm AP11 controller door fully open Clearance Front 48 in 1220 mm Back distance to install the source container Sides 18 in 457 mm Anchoring Qty 4 9 16 14 3 mm mounting holes Process Connections...

Страница 98: ...mm diameter Tubing connections are made at the top rear of the enclosure The GASGUARD BSGS eV BULKGUARD eV module is designed for indoor or protected outdoor installation Outdoors the system must be...

Страница 99: ...lb HCl 0 1 lb CO2 Pre purge operating sequence Total mass of N2 vented SiH4 requires 120 purge cycles 2 4 lb NH3 requires 90 purge cycles 1 8 lb NF3 requires 75 purge cycles 1 5 lb N2O requires 75 pur...

Страница 100: ...current 32 amps 5 kAIC 240 VAC 75 deg C terminal rating Single Power Feed for Module with Heat Trace no JT Heater 208 240 VAC 50 60 HZ Full load current 7 amps 5 kAIC 240 VAC 75 deg C terminal rating...

Страница 101: ...e Safety Shutdown This shutdown is the result of any customer Life Safety System LSS device Upon receipt of this signal all pneumatic valves will close but power to the AP11 controller and J T heaters...

Страница 102: ...n on source B1 DI 38 Vent Scrubber Unavailable If this customer initiated alarm is present purge and cylinder change sequences will be inhibited and if underway will be aborted until the customer s sc...

Страница 103: ...__________________________________________________ MNL000532 Revision 0 10 03 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Prop...

Страница 104: ..._______________ MNL000532 Revision 0 10 03 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 4 2 The contents...

Страница 105: ...__________________________________________________ MNL000533 Revision 0 10 03 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Prop...

Страница 106: ..._______________ MNL000533 Revision 0 10 03 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 2 The contents...

Страница 107: ...__________________________________________________ MNL000534 Revision 0 10 03 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Prop...

Страница 108: ..._______________ MNL000534 Revision 0 10 03 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 2 The contents...

Страница 109: ...___________ MNL000535 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 1 Chapter 7 System...

Страница 110: ...hardware and its interface with optional equipment BSGS eV BULKGUARD eV Module Module Configurations The GASGUARD BSGS eV BULKGUARD eV is configurable by four option sets Number type of sources singl...

Страница 111: ...ilation the source deep purge panel will be located coaxially within the ventilation duct Deep Purge with Dedicated Venturi This option requires the installation of the source deep purge panel option...

Страница 112: ...tomer scope In the case of a deep purge system with Venturi the connections between the main BSGS eV BULKGUARD eV cabinet and the Venturi shroud AS WELL AS the connection between the Venturi shroud an...

Страница 113: ...vide the customer with a remote indication of system alarm status if the customer chooses to wire to these outputs The naming convention for these components is name xyz Name is component type PT for...

Страница 114: ...the controller will initiate a side shutdown and crossover to the opposite process side if it is in standby mode If associated with the standby module this alarm will inhibit the standby side from com...

Страница 115: ...ns the regulator is set too low or the flow rate has exceeded the system design creating excessive pressure drop and regulator droop PT 2x PALL Low low delivery pressure shutdown alarm This alarm coul...

Страница 116: ...nd interrupt the supply of process gas to the customer PT 10x is Optional one per process train PT 10A B is the interstage pressure monitor included with the dual stage regulation option This pressure...

Страница 117: ...line will be interrupted WT 1xy WAH On Line high weight fault alarm This is an indication that the scale may not be calibrated correctly net liquid weight is incorrect or transfill is occurring betwee...

Страница 118: ...e alarm may also be caused by a drastic increase in flow rate and is considered normal The AP11 eV controller is a reactionary device limited in response characteristics and cannot anticipate the addi...

Страница 119: ...ude a failed SSR or incorrect temperature controller setpoint AI 51 is Optional This is the analog input assigned to the Source B inlet heat trace temperature monitoring and control thermocouple There...

Страница 120: ...s include a failed SSR or incorrect temperature controller setpoint TAHH 52 Panel heat trace high high temperature alarm This setpoint is higher than TAH 52 in order to provide the customer with addit...

Страница 121: ...posite module if it s in standby mode This contact is powered to 24 VDC 3 mA UA 7Bx is Standard It is the Customer Remote Shutdown Source B1 or B2 The Single Module will close valves V 1 and V 8 for s...

Страница 122: ...ual RSHH 15 UVIR flame detect If a flame is detected for more than 5 seconds at source A1 the UVIR detector will send a shutdown signal Upon receipt of this shutdown signal through a hardwired input p...

Страница 123: ...detect and shutdown the module in the event of flame detection The following alarms may be displayed on the AP11 controller UA 18 UVIR fault alarm In addition to the fault alarm displayed on the AP11...

Страница 124: ...arm delay to prevent nuisance alarms due to a temporary drop in exhaust AI 32 is Standard A pressure transducer inside the AP11 controller monitors pneumatic pressure to the solenoid valves that send...

Страница 125: ...e actuation containers Y cylinder drum tonner NH3 ISO etc and can be located at source A1 A2 B1 or B2 This option provides the operator with prompts in the correct sequence to open and close the manua...

Страница 126: ...en and close this valve MV 0B is Optional It is the container manual isolation valve source B This option provides software with the correct prompts for a container manual valve The operator is prompt...

Страница 127: ...ard It is the high pressure process filter This filter is located upstream of the regulators to protect the regulators from particles It has a 5 micron filtration rating and can contain either a SS or...

Страница 128: ...nal process out B has been purchased MV 38A 2 is Optional It is the process outlet A manual dual isolation valve This optional valve is located downstream of MV 38A 1 and is installed for the purpose...

Страница 129: ...has been equipped Its purpose is to isolate purge and high pressure leak check gas from the vent piping circuit It is actuated by the AP11 controller during purge and change cylinder sequences CV 4 i...

Страница 130: ...a branch of the purge vent piping circuit within the main cabinet Its purpose is to isolate the high pressure leak check gas from the vent piping circuit It is actuated by the AP11 controller during a...

Страница 131: ...ng the pre purge sequence initial vent and conditioning sequence until pressure has decreased to 75 psig The amount of silane vented during each operating mode can be found in the installation section...

Страница 132: ...couple junction box located adjacent to the container Wiring between the junction boxes and heater controller is customer supplied and installed Please see the separate Gen II Blanket Heater operation...

Страница 133: ...additional current and the BSGS eV BULKGUARD eV does not provide power and only receives the two signal wires See Chapter 2 for additional information on wiring analog inputs Container Tube Switching...

Страница 134: ...tions by sequencing valve actuation Adequate purging is ensured by checking pressure and vacuum at each step within the purge cycles The controller also has the capability of shutting down the system...

Страница 135: ...display of the process gas panel shutdown and fault alarm boxes a controller status box and the selection window The screen that is displayed when the system is powered up for a dual source dual proce...

Страница 136: ...uch the words Main Menu at the top of the window The Main Menu will appear like the illustration to the right To return the Main Menu to its full size simply touch the words Main Menu at the top of th...

Страница 137: ...ox is located in the top center of the screen and displays the current status of the process panel Refer to Figure 7 4 Figure 7 4 Alarm and Controller Status Boxes Source System Information The source...

Страница 138: ...hutdown alarm Once acknowledged the LED stops flashing but remains red until it is reset Fault Alarm This LED flashes yellow on power up and for a fault alarm Once acknowledged the LED stops flashing...

Страница 139: ...will blank the screen and a randomly moving mode indicator box will appear on the screen The screen saver function will become active when the programmed amount of time has elapsed since the last oper...

Страница 140: ...g the BACKSPACE key to eliminate the exiting data it is possible to highlight the data by simply dragging your finger across the field and then entering the new data using the on screen keypad Z Purge...

Страница 141: ...ossible to return to Online mode once this sequence completes If this sequence is stopped or aborts for an alarm condition and is restarted by the operator it will restart at the beginning of the sequ...

Страница 142: ...t cylinder change purge sequence A number of vacuum and pressure cycles similar to pre purge are run designed to remove potential atmospheric contamination that may have entered the pigtail during the...

Страница 143: ...ne mode the appropriate tube switching mode must be selected See Chapter 8 section 4I for a description of tube switcher operation and the modes available Start Src A1 A2 B1 B2 Scan Optional This mode...

Страница 144: ...and Appendix A for more details and electrical drawings All field digital and analog I O signals are terminated either in the AP11 controller enclosure or in an interface box mounted to either side o...

Страница 145: ...eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 37 Field terminations that need to be made in either of the interface boxes shou...

Страница 146: ...ponent as required via the SSR and protected by a GFCB The thermocouple signals are monitored by alarm notifications Low and high temperature alarms alert the operator to heater temperatures outside n...

Страница 147: ...Data Page 8 1 Chapter 8 Operating Procedures Section 1 Emergency Stop Section 2 Starting a New System Section 3 System Shutdown and Startup Section 4 AP11 Controller Operation A Pre Purge B Change So...

Страница 148: ...as at the source and shutoff power to the JT heater Note The Emergency Stop E Stop circuit closes all automatic valves and sounds the alarm horn 2 Evacuate the area The Emergency Stop E Stop button ma...

Страница 149: ...for pneumatics and available at 85 95 psig 5 9 6 5 barg If the process gas container is heated Y or ISO heater controller present be sure the heat trace temperature is set about 10 F 5 C higher than...

Страница 150: ...startup instructions listed below The atmosphere within the AP11 controller as well as high and low voltage cabinets must be inerted before turning on the electrical power main switch IMPORTANT Care...

Страница 151: ...the shutdown alarm window again to reset any alarms No alarms should be present If alarms are present do not continue Alarms must be cleared before the controller can be placed in an operating mode 4...

Страница 152: ...verify that the adjustable process regulators are closed knob rotated fully counterclockwise Non adjustable regulators should not be changed since they are factory pre set 6 Verify the installation of...

Страница 153: ...____________ MNL000536 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 7 If the heat trac...

Страница 154: ...th container scales not supplied by the Versum Materials Inc factory will come with pre set analog scaling This scaling may not match the range of the scales installed on site Use the following proced...

Страница 155: ...000536 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 9 Using a 3rd level password log i...

Страница 156: ...e correct mimium and maximum input values from the scale After making the change press the Apply button and OK button then the Cancel button to back out of the menu 10 Begin the Pre Purge program sequ...

Страница 157: ...ample When power is removed from the controller all pneumatically controlled valve valves will revert to their normally closed position Startup after a planned shutdown falls into the two categories d...

Страница 158: ...ecorded prior to the shutdown must be present before placing the module Online flowing process gas Failure to do so can result in operational problems and liquefied process gas being delivered to the...

Страница 159: ...ce than the examples shown in this manual The software for your system has been programmed to support the as built configuration for source containers purge type regulators JT heater etc Some of the o...

Страница 160: ...Invalid Password will be displayed at the bottom of the password window Re enter correct password and press OK again 4 Use the and keys or the drop down menu to select the correct source line Note Un...

Страница 161: ...m is in the cross purge configuration and there are two sources installed on one process side the Pre Purge mode will impact both sources A1 and A2 B1 and B2 when initiated on one side of the system T...

Страница 162: ...press the OK key 4 Use the and keys or the drop down menu to select the correct source line The following instructions are for Pre Purge sequence source A but the same procedure applies to source B 5...

Страница 163: ...ource xy Pneumatic Line Manually Lock ACV After completing task acknowledge prompt by pressing the OK Key The prompt on your controller may be different depending on your source container valve config...

Страница 164: ...to V 1 deep purge or V 2 cross purge will be evacuated of process gas 11 OPERATOR PROMPT A prompt will appear on the display to Close Manual Valve MV 1xy After closing valve acknowledge prompt by pre...

Страница 165: ...Note During the leak test the status box displays the following 1 The leak test being run 2 The process line number Source A1 process line 1 Source A2 process line 2 Source B1 process line 3 Source B...

Страница 166: ...ata Page 8 20 Note All automated valves are closed at the end of the sequence The sequence then goes to the start of Idle Mode Dual Pre Purge Option for Dual Source Systems with Deep Purge The Dual Pr...

Страница 167: ...y meaning which source on that side MV1 B2 would be the second source container on the B side of the equipment If the system is in the cross purge configuration and there are two sources installed on...

Страница 168: ...f the deep purge option is present then only one source per module can be in this mode at one time If your module is equipped with the heat trace option heat trace on the pigtail being purged will hav...

Страница 169: ...ing task acknowledge prompt by pressing the OK Key 10 Operator prompt OPTIONAL when vessel weight scales are used product weight must be entered to monitor product usage After completing task acknowle...

Страница 170: ...splayed in the status box in the bottom left corner Note During the pressure test the status box displays the following 1 The pressure test being run 2 The process line number 3 The time remaining unt...

Страница 171: ...ollowing 1 The leak test being run 2 The process line number 3 The time remaining until the completion of the leak test 1 2 3 13 Operator prompt If helium is used for this check a Mass Spectrometer ma...

Страница 172: ...st being run 2 The process line number 3 The time remaining until the completion of the leak test 1 2 3 14 Operator prompt NOTE HPLT High Pressure Leak Test is optional if hardware present and requiri...

Страница 173: ...ial and Proprietary Data Page 8 27 Dual Change Cylinder Option for Dual Source Systems with Deep Purge The Dual Change Cylinder Option is only available on the A 2 or B 2 source Main Menu on systems e...

Страница 174: ...rpose This Manual Sub Section describes the AP11 Controller Program Routine that is used to purge and evacuate all atmospheric contamination from the process pigtail after any container change or pigt...

Страница 175: ...Post Purge sequence source A but the same procedure applies to source B 5 Press the START POST PURGE Pushbutton If Post Purge is running for side A purge sequences for side B will not be available Onl...

Страница 176: ...MV 2 cross purge will be evacuated of purge gas Note A subroutine will perform the Vacuum Leak Test Cylinder Leak Test to insure the source container valve is closed The leak test status is displayed...

Страница 177: ...KGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 31 Note During the cycle purge the status box displays the following 1 The...

Страница 178: ...ost Purge Option is only available on the A 2 or B 2 source Main Menu on systems equipped with two sources on one side and the deep source purge option This DualPstPrg mode runs the Change Cyl routine...

Страница 179: ...ial and Proprietary Data Page 8 33 4 D Process Gas Conditioning Purpose This Manual Sub Section describes the GASGUARD AP11 Controller Program Routine that is used to initiate process gas flow within...

Страница 180: ...urce A but the same procedure applies to source B 4 Press the START CONDITION pushbutton 5 The Confirm Sequence Start window will be displayed Press the CONFIRM pushbutton 6 Operator Prompt OPTIONAL i...

Страница 181: ...Note A purge vent subroutine is run to purge out the pigtail utilizing process gas During the cycle purge the status is displayed in the status box in the bottom left corner Note During the cycle purg...

Страница 182: ...6 4 E Process Gas Flow Purpose This Manual Sub Section describes the AP11 Controller Program Routine that is used to initiate process gas flow within the module The following table describes the steps...

Страница 183: ...y Data Page 8 37 4 PASSWORD WINDOW Enter password on keypad and press the OK key 5 Main Menu screen will be displayed Use the and keys or the drop down menu to select the correct source line The follo...

Страница 184: ...e Sw program See Section 4 I for details about how to operate this feature On Line Continuation 10 If the module is configured as a dual process train system and the opposite train is already On Line...

Страница 185: ...This Manual Sub Section describes the AP11 Controller Program Routines for stopping process gas flow and restarting process gas flow Stop Process Gas Flow To stop the flow of process gas on the GASGU...

Страница 186: ...erials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 40 3 PASSWORD WINDOW Enter password on keypad and press the OK key 4 Main Menu screen will be...

Страница 187: ...ULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 41 6 The Confirm Sequence stop window will be displayed Press the CONFIR...

Страница 188: ...flow of process gas on the GASGUARD AP11 Controller the Start On Line gas flow routine must be run The following table describes the steps to be followed when using the GASGUARD AP11 controller Start...

Страница 189: ...4 Main Menu screen will be displayed Use the and keys or the drop down menu to select the left or right process line The following instructions are for source A but the same procedure applies to sourc...

Страница 190: ..._____________________ MNL000536 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 44 Upon d...

Страница 191: ...s the AP11 Controller Program Routine that runs whenever there is no other routine running The GASGUARD AP11 Controller Program Routine Idle Mode cannot be selected from the display MENU Idle mode is...

Страница 192: ...Mode operation should never be used to flow process gas because critical shutdown alarms may be disabled NOTE The GASGUARD AP11 Controller will not allow access to Manual Mode when certain shutdown a...

Страница 193: ...e the following hazards which can result in PERSONNEL INJURY OR DEATH Process gas could be forced into the purge panel and or purge gas cylinder Opening purge panel valves when high pressure process g...

Страница 194: ...ial and Proprietary Data Page 8 48 4 The main menu screen for the selected panel will appear on the screen 5 Press the MANUAL MODE pushbutton The MANUAL MODE window will display 6 Operate valves refer...

Страница 195: ...box 2 The valve confirmation window will appear Confirm that you want to open the valve by pressing Pressing will close the window leaving the valve closed To Close a Valve Simply select the valve by...

Страница 196: ...ce it is in Manual Mode is open to anyone General Principles of Manual Operation Open valves in sequence starting at the first valve downstream of the pressure source and continuing to the next valve...

Страница 197: ...hen the Tube Switching option is purchased the tube switching program is accessed from the module AP11 controller The BSGS eV BULKGUARD eV system allows for automated tube switching of 2 ISO s with on...

Страница 198: ...l and Proprietary Data Page 8 52 PASSWORD WINDOW Enter password on keypad and press the OK key Main Menu screen will be displayed Use the and keys or the drop down menu to select one of the Source x T...

Страница 199: ...revision and date shown All rights reserved Confidential and Proprietary Data Page 8 53 The Gas Available relay is energized T Sw 2x2 will be displayed Process gas is now available to flow from the so...

Страница 200: ...s Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 54 The Gas Available relay is energized T SW All will be displayed Process gas is now available to...

Страница 201: ...sion and date shown All rights reserved Confidential and Proprietary Data Page 8 55 Main Menu screen will be displayed Use the and keys or the drop down menu to select the correct tube switcher Press...

Страница 202: ...urns off power to the optional JT heater and heat trace if present Change Y Container These procedures cover the steps the operator must follow to safely change a Y container or drum In the following...

Страница 203: ...ce and perform all the tasks identified on the controller When instructed to disconnect the Y container proceed with the following 2 Remove the clevis pin that holds the flexible ventilation duct if i...

Страница 204: ...e 3 Return the empty Y container to the appropriate storage area Install Full Y Container or Drum 1 The Y Container is attached to a cradle which supports it during transportation The Y container can...

Страница 205: ...attempt to open a frozen cap as this might damage the cylinder valve and cause a high pressure gas leak that could result in personal injury or death 3 Verify that the cylinder valve is tightly close...

Страница 206: ...values are as follows Cylinder valve Pigtail connection Torque Brass CGA Stainless steel CGA 80 ft lb Stainless steel CGA Stainless steel CGA 90 ft lb Stainless steel DISS Stainless steel DISS 35 ft l...

Страница 207: ...the optional JT heater and heat trace if present Change ISO Container These procedures cover the steps the operator must follow to safely change an ISO Container or tube trailer In the following proc...

Страница 208: ...e tasks identified on the controller When instructed to disconnect the ISO container proceed with the following 2 Verify that the container discharge valve is closed when prompted If multiple tube val...

Страница 209: ...not attempt to use an ISO container with a damaged or contaminated discharge connection 3 Remove the pigtail connection protective plug 4 Fasten the pigtail hose to the container discharge connection...

Страница 210: ...l 2nd 3rd Manual Mode W W Net Product W W User Analog Setpoints RO W Subcycle Parameters RO W Leak Test Parameters RO W System Test W W Valve Setup NA RO Valve Counts RO W Operation Sequences NA RO Se...

Страница 211: ...for this analog A net tag will also appear at the analog display box If zero is entered the gross or unadjusted value will display with no additional tag This window is also used to enter the full cyl...

Страница 212: ...ndition 0 Cycles Outboard Helium Leak Test 1 Cycle To change a value select the parameter of your choice by touching the screen Use the keypad to type in a numeric value Press to accept the changes Pr...

Страница 213: ...st Digital Out This option displays a list of the digital outputs and their current values Outputs may be forced on energized or off de energized to determine if the output is operating properly This...

Страница 214: ...e controller number controller name controller input controller input type controller input value and controller comm status for different controllers on the network Changes to parameters in the Test...

Страница 215: ...sequence that is permitted to be selected from the main menu after an end stop or fail of the chosen sequence Changes to sequence flow options will not be allowed Prompt List The Prompt List window wi...

Страница 216: ...erator to change the alarm condition for digital alarms to either a closed open or not used The alarm condition for analog alarms is either a high low or not used The window will allow the operator to...

Страница 217: ...ging your finger across the password field at the bottom of the window and 3 use the keypad to enter the new password Only numeric characters are permitted in 1st level passwords and the first charact...

Страница 218: ...f security The degrees of access will be No Access Read Only or Write The operator will be allowed to view the access list or exit the window Only users with the VERSUM MATERIALS INC password will be...

Страница 219: ...ow the operator to change the Network Control state to either Enable or Disable RS 485 Channel Number The RS 485 change channel option will allow the operator to change the left and right RS 485 chann...

Страница 220: ...y be accessible by users with the Versum Materials level password Memory Management The Memory Management window will display the options listed below The operator will be allowed to choose an option...

Страница 221: ...00537 Revision 0 10 03 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 9 1 Versum Materials Confidential Cha...

Страница 222: ...dential 1 0 System Errors Problem sources tests and solutions are suggested for the following system conditions System Down No Lights on Controller No or Low Purge Gas Pressure No or Low Purge Gas Flo...

Страница 223: ...sed Check position of cylinder valve Open cylinder valve pressure should indicate the current purge cylinder pressure Purge gas cylinder pressure is low Check cylinder pressure Change purge cylinder P...

Страница 224: ...Possible Source of Problem Test Solution No or low purge gas pressure Check position of cylinder valve Open cylinder valve pressure should indicate the current purge cylinder pressure Purge gas manual...

Страница 225: ...Insufficient Vacuum Possible Source of Problem Test Solution No or low nitrogen supply pressure to vacuum Venturi Check position of customer supply valve Open valve check Venturi vacuum V 7 TP pneumat...

Страница 226: ...s as necessary Manual valve closed in the process stream Check to make sure the manual valves are all open Open closed manual valve Automatic Valve in the Process stream is closed Check to make sure t...

Страница 227: ...stream is closed Check to make sure the automatic valves are working properly Repair any malfunctioning automatic valves Vent valves open Check position of all vent valves Close any vent valves if ope...

Страница 228: ...his section provides information on possible alarms that can occur while operating a BSGS eV BULKGUARD eV module This assumes that all devices are calibrated and functioning according to the manufactu...

Страница 229: ...Low Process Inlet Pressure Probable Cause Corrective Action Process supply container is below the low pressure or weight setpoint Follow the procedure to change out the supply container Applicable man...

Страница 230: ...essure regulator to the desired delivery pressure Withdrawal rate is high causing container excessive pressure drop and regulator droop Reduce the withdrawal rate to within equipment specifications Si...

Страница 231: ...s Delivery pressure will increase On single stage regulator systems the regulator will require periodic readjustment as source container pressure drops Heat trace temperature is set lower than Adjust...

Страница 232: ...ation If regulator creeps replace the regulator Low Purge Pressure Probable Cause Corrective Action Purge gas delivery pressure is too low Adjust purge pressure regulator to the desired pressure Purge...

Страница 233: ...hat vent piping complies with Vacuum Venturi Vent Line Sizing recommendations in Chapter 4 Comply with recommendation and resize the vent line V 7 TP pneumatic valve not receiving sufficient pressure...

Страница 234: ...be caused by a drastic increase in flow rate and is considered normal The PID controller is a reactionary device and cannot anticipate the additional demand on the J T heater High J T Heater Temperat...

Страница 235: ...rete hardwire shutdown Its purpose is to turn off power to the J T heater in the unlikely event heater temperature reaches 212o F 100o C Following a trip it must be manually reset The following paragr...

Страница 236: ...age 9 16 Versum Materials Confidential Figure 9 1 J T Heater Reset Button CAUTION Before restoring power in a hazardous gas location verify no flammable atmosphere is present Read and comply with the...

Страница 237: ...3 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 1 Chapter 10 Maintenance Section 1 Routine Maintenan...

Страница 238: ...with the gases to which they may be exposed This is particularly critical for the soft goods e g O rings valves seats and seals etc Consult Versum Materials Inc if there is any question about part com...

Страница 239: ...d tightly to the heat trace Reinstall and secure to the heat trace as required Regulators Observe operation of regulators during pressure adjustment If pressure changes are not smooth remove and repla...

Страница 240: ...s leakage Replace components as required Pressure Transducers Check and record process and purge pressures for readings that are outside of the specification range Look for dramatic changes in reading...

Страница 241: ...High Process Source Weight on all WT 1 s Verify that process liquid weight above the high high setpoint initiates a process line shutdown Low Low Process Source Weight on all WT 1 s Verify that proce...

Страница 242: ...egrity of the gasketing on the door of the electrical enclosures Repair any damaged areas Inspect the electrical enclosure for signs of water entering the enclosure Isolate leak point and repair Verif...

Страница 243: ...fy the integrity of the temperature element and capillary used for the heat trace control Verify that it is securely attached to surface being measured and no kinks are visible in the capillary JT Hea...

Страница 244: ...18 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 8 2 0 Mechanical Integrity This section provides four diffe...

Страница 245: ...Date Visual inspection of piping and wetted components for leaks and damage that could lead to loss of containment T F P C Visual inspection of wiring and electrical components for damage to insulatio...

Страница 246: ...M TYPE ACCEPTABLE Y N NA INSPECTED BY Initial 3 Years Date Test or Replace safety relief valves C EGO EMP or EPO or E stop or Remote E stop or Customer remote shutdown T F P C Flexible hose testing or...

Страница 247: ...Name of Inspector s ________________________________________ _______ Signature of Inspector s ________________________________________________ INSPECTION OR TEST SYSTEM TYPE ACCEPTABLE Y N NA INSPECT...

Страница 248: ...or leaks and damage that could lead to loss of containment T F P C Visual inspection of wiring and electrical components for damage to insulation corrosion T F P C 1 Year Date Cabinet Exhaust Low alar...

Страница 249: ...the nonincendive circuit must be replaced in kind with components that have the exact part number and specifications as those provided Failure to conform to this requirement may compromise the integr...

Страница 250: ...shown All rights reserved Confidential and Proprietary Data Page 10 14 JT Heater Heat Trace Ground Leakage Test Shock Hazard With the control system energized open the ECC enclosure door With ground f...

Страница 251: ...ed to ensure the safe and proper functioning of the system The life of the system as a whole is considered to be 10 years Electrical Components Component Expected Life Changeout Frequency 24 Volt Powe...

Страница 252: ...wing Package MNL000539 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP A 1 Appendix A I...

Страница 253: ...019553 Rack SW019596 Deep Purge Venturi Panels SW019824 Ducting for Deep Purge Venturi SW019820 PVC End Cap for Source BSGeV MECH 0031 Field Details Tube Switcher BSGeV MECH 0032 Field Details BSGeV C...

Страница 254: ...x A Installation Drawing Package MNL000539 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page...

Страница 255: ...x A Installation Drawing Package MNL000539 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page...

Страница 256: ...x A Installation Drawing Package MNL000539 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page...

Страница 257: ...x A Installation Drawing Package MNL000539 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page...

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Страница 331: ...__________________________ MNL000540 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP B...

Страница 332: ...rvice Critical spare components Regulators One PCV1A B and one PCV2A B for each type pressure rating 316 SS C22 PCTFE Vespel seats found within the equipment set RFO One for each orifice size found wi...

Страница 333: ...RSUM MATERIALS 440969 Customer Board STD part AP1563 replacement board only see item 6 for complete kit 6 Customer Board 0 1 VERSUM MATERIALS 440776 Customer Board STD Kit includes AP1563 board cables...

Страница 334: ...RSUM MATERIALS 400509 SETRA Exhaust sensor cable SW008106 SLDDRW 25 Misc 0 1 Allen Bradley 409501 Push Button Mushroom Head Red Maintained Push Pull Twist to Release 26 Misc 0 1 Mallory Sonalert 17153...

Страница 335: ...cific Parts Item Category Critical Spare Part Qty Recommended Spare Part Qty Manufacturer GASGUARD Part Description 100 Power Supply 1 0 Phoenix Contact 9 688 79 2761 Power Supply 24VDC 2A 101 Heat Tr...

Страница 336: ...__________________________________________________________ MNL000140 Revision 3 08 01 2016 Gas Equipment Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Pro...

Страница 337: ...quipment Description GASGUARD UHP Delivery Systems Fluid state All Fluid group All Design Pressure All Piping nominal size DN Less than DN25 Less than one inch nominal diameter Classification accordin...

Страница 338: ...__________________________________ MNL000541 Revision 0 10 04 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Pag...

Страница 339: ...If the installation does not satisfy the requirements for facilitation and startup the team will provide a list of the discrepancies to the designated site representative Depending on the scope of dis...

Страница 340: ...3 Read and sign the Customer Certification on the last page 4 Fax the completed checklist to the attention of the Versum Materials Inc Project Engineer of record Customer Name Date Customer Location G...

Страница 341: ...uct and clamps tube switching pneumatic tube bundles etc shipped with the equipment is in an identified location individual s possession C All mechanical VCR and or Swagelok connections are tight D Al...

Страница 342: ...pplicable Verify vent lines are complete and installed into appropriate header and all fittings are tight If vent header is purged ensure purge source is connected and available F All source container...

Страница 343: ...purge lines installed helium leak tested and qualified Record Purge Piping Installation drawing number and revision Dwg _______________ Rev ___ Verify all connections are tight B Purge and He leak che...

Страница 344: ...l power connected to each piece of equipment Record Field Interconnect drawing number revision Dwg ____________ Rev ___ C Power wiring Megger tests completed by installer and test results turned over...

Страница 345: ...lates showing voltage level amps frequency and where source of electrical power originates C Safety Level 2 approvals for Hazardous Gas in process of being complete D Hazardous gas monitoring leak det...

Страница 346: ...te Time Temperature F Inlet Pressure psig Outlet Pressure psig H2O O2 A Baseline ppb B Final Readings ppb This BSGS eV BULKGUARD eV System equipment was installed in accordance with applicable Versum...

Страница 347: ...____________________________________________ MNL000542 Revision 1 03 26 2018 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietar...

Страница 348: ...facilitation Facilitation the process of installing all utilities and piping to support the equipment and verifying the operation and safety of the gas delivery equipment This includes electrical test...

Страница 349: ...Verify all bulkhead fittings on piping into the BSGeV are tight E Verify all unistrut and supports have no sharp edges or are capped to prevent injury F Verify all doors close and latch properly check...

Страница 350: ...RSUM MATERIALS INC safety protocols G Voltage level warning stickers installed on each piece of equipment as required by Customer and VERSUM MATERIALS INC safety protocols H Complete the VERSUM MATERI...

Страница 351: ...d properly connected terminated Ensure all circuit breakers and switches are in the Open Off position O Verify incoming power feeds with installation electricians Verify incoming power wiring is the p...

Страница 352: ...Main Circuit Breaker CB 102 and adjacent terminal blocks if control power fed separately Heater Power fed from _________________________________________ L1 1 to L2 1 ______VAC L1 1 to GND ______VAC L...

Страница 353: ...the right of SW1 SW1 and SW2 are stenciled on the board adjacent to their respective switch banks There are 8 switches per bank numbered 1 though 8 starting from left to right Digital Input 21 SW1 1...

Страница 354: ...the source heater temperature H In the analog setpoints screen confirm the JT Heater temperature alarm setpoints Low Low control setpoint minus 20 C ______ C Low control setpoint minus 10 C ______ C H...

Страница 355: ...AP controller Pull out the Emergency Stop push button to reset it and press Reset Verify the Emergency Stop is labeled and its guard is in place V Optional Z Purge Pressure Switch PSL 206 Verify incom...

Страница 356: ...contactor CR 202 is de energized during a flame detect Verify JT Heater contactors continue de energized until UVIR Detector is manually reset and Alarm is cleared Reset the UV IR Detector fault relay...

Страница 357: ...tivates on the AP controller when Customer s Source a Remote Shutdown A signal is de energized Reset the signal and verify the alarm can be cleared Reference DI 28 on the alarm matrix NN Vent Scrubber...

Страница 358: ...T6 11 T6 12 TT If Supervisory Circuits shall be utilized verify the proper alarm numbers are being used and the wiring is terminated in the proper terminal blocks Verify functionality of the supervis...

Страница 359: ...sets of zero and full scale have been completed with no adjustments to the device check one final time at 75 50 and 25 of full scale Ex 0 3 000 pound scale must be calibrated using 0 3 000 pounds of...

Страница 360: ...listed on the Alarm Matrix Low Low level Shutdowns Low level Faults High level Faults and High High level Shutdowns As each Fault Alarm or Shutdown Alarm is activated on the AP controller verify the...

Страница 361: ...o Customer local Versum personnel C Copy hard or soft of this document shall be given to Customer local Versum personnel D Verify that all Operating Manuals keys safety documentation and extra commiss...

Страница 362: ...V equipment was installed in accordance with applicable Versum Materials Inc Engineering Standards and Practices By signature this site is ready for final commissioning and startup by the VERSUM MATER...

Страница 363: ...__________________________ MNL000543 Revision 0 10 04 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP F...

Страница 364: ...ssioning of the system MBS or MAS A Design Construction Commissioning Pre Operational Verifications A00 P ID Flow Check A00 01 Flow check against P ID s performed A00 02 Reconcile any differences iden...

Страница 365: ...ubbed exhaust solvent exhaust ammonia exhaust etc A06 11 Verify all equipment process gas vents are connected to appropriate exhaust or abatement systems A07 Safety Relief Devices and Vent Locations A...

Страница 366: ...ipment has been labeled with tag number and or name A08 03 06 Check and verify all cabinets and panels have been bolted down and or secured per design A08 07 Packaged Miscellaneous Equipment Specific...

Страница 367: ...eak testing A10 09 If the container Y Drum or ISO is heated verify piping from the container connection to the outlet of the piping cabinet is heat traced and insulated Depending on ambient temperatur...

Страница 368: ...en poured following validation loop checks A14 05 10 Verify to confirm that all inert purge sources are properly connected to control panels per installation documents Z Purge A14 08 Emergency Power U...

Страница 369: ...y proof tested and that documentation exists to confirm that all the tests have been passed Include verification of successful testing of any hardwired emergency shutdown system A16 01 04 For programm...

Страница 370: ...ng electrical and software jumpers and that the procedure is communicated to the start up commissioning team The procedure must include a requirement for maintaining a log of jumpers installed and rem...

Страница 371: ...oup and any contractors that may remain onsite following startup of any unit C02 02 Verify documentation exists to confirm all Mandatory Before Start up hazard review recommendations have been closed...

Страница 372: ...E Procedures for Operation Emergencies and Safe Work Practices E01 06 Confirm the availability of documented normal start up operation and shutdown procedures E01 07 Confirm the availability of docume...

Страница 373: ...thod test frequency and acceptance criteria for testing i e Mechanical Integrity Program of the following G01 01 01 IL 3 Critical Safety Circuits See Global EH S Procedure 01 20 24 G01 01 02 Stationar...

Страница 374: ...a written plan is in place for Right to Know requirements K09 Site Security Systems K09 01 Verify that the operations construction team has conducted planning meetings to address security issues relat...

Страница 375: ...PERSON DATE COMPL D CLOSEOUT STATEMENT ACTIONS REQUIRED FOR CLOSEOUT COMMENTS K10 04 Verify the security systems have been function tested and commissioned and documentation exists to confirm K10 05...

Страница 376: ...________________________________________ MNL000544 Revision 0 10 04 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Da...

Страница 377: ...in GG500 APx TEx and Chemguard cabinets racks wall mounts VMBs VMPs HFS s VHF and BSGS s Versum Materials Inc strongly recommends the use of a UV IR detector over any other type of flame detection dev...

Страница 378: ...e simultaneously at both these spectral bands UV and IR enables fast and reliable Electro Optical fire detection with high immunity to false alarms Note that this Silane flame detection does not rely...

Страница 379: ...rned on UV reflects off the metal lens guard and should be sensed by the UV sensor If the detector does not sense the internally generated UV it assumes that the lens is blocked and will declare a fir...

Страница 380: ...5 Closed Used for all other gases The detector will declare a fire if UV and IR are present but can declare a fire with only the presence of IR 6 Open Testing of the UV sensor occurs every 30 minutes...

Страница 381: ...e lens then the exposed surface of the UV sensors and the protective grill mounted on the outside of the housing cover Testing of the UV sensor automatic built in lens test occurs every 30 minutes Ver...

Страница 382: ...he flow of gas Power will also be turned off to the UV IR detector This alarm is initiated when the detector senses a steady flame or fire for five seconds Flame verify is a hardwire alarm The alarm i...

Страница 383: ...ire a shutdown of the equipment A UV IR Fault can be simulated by placing a non reflective surface i e black paper in front of the UV IR metal lens protector for at least 30 minutes This causes the UV...

Страница 384: ...________ MNL000544 Revision 0 10 04 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP G 9 Versum Materials...

Страница 385: ...______________________________________ MNL000545 Revision 0 10 04 2017 BSGS eV BULKGUARD eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data...

Страница 386: ...reader or any other USB device is not intended to be permanently connected to the external USB port The external USB port is intended for intermittent use and USB devices connected to it should be us...

Страница 387: ...ase see the Barcode Setup procedure below Barcode Data Window On the controller a window accessed via the System Setup menu of the Configuration Menu will allow the viewing and modification of the bar...

Страница 388: ...barcode scanner option the information may be entered automatically by scanning the barcode Otherwise the information may be entered manually thru a pop up keypad on the controller screen If the barco...

Страница 389: ...te Barcode strings are case sensitive Be sure to use the proper case when entering letters The case can be toggled between uppercase and lowercase by pressing the shift key f Select Barcode Setup from...

Страница 390: ...ify that barcode contains the product code ii 1 In addition to verifying the product code this validation method verifies that the Barcode is not the same any previously installed cylinder iii 2 In ad...

Страница 391: ...nc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP H 7 Versum Materials Confidential How to disable the barcode feature a Highlight the input line b Se...

Страница 392: ..._______________________________________________ MNL000546 Revision 0 10 04 2017 BSGS eV Bulkguard eV Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprie...

Страница 393: ...d are in the desired position to facilitate connection to the supply piping the heater blanket and insulation cover are attached to the cylinder The system is also designed to maximize commonality of...

Страница 394: ..._________________________________________________________________________________________ MNL000546 Revision 0 10 04 2017 BSGS eV Bulkguard eV Versum Materials Inc as of the revision and date shown Al...

Страница 395: ...wing control devices 1 each resistive heater element 1 each temperature indicating controller 1 each over temperature limit controller 1 each Silicone Controlled Rectifier SCR power controller 1 each...

Страница 396: ...c as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP I 5 Layout Details The system layout varies based on the process gas source container type and size a...

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