Chapter 9 - Troubleshooting
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MNL000537
Revision 0
10/03/2017
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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9
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15
Versum Materials Confidential
3.0 J‐T Process Heater Reset Procedure
Each JT heater has a discrete hardwire shutdown. Its purpose is to turn off power to the J-T heater in
the unlikely event heater temperature reaches 212
o
F (100
o
C). Following a trip, it must be manually
reset. The following paragraphs describe the reset procedure.
CAUTION! Before performing the following task, power must be removed from the heater
to avoid shock during the TSH-5 reset. Turn off and lock out power prior to opening the
J-T heater lid.
TSH-5 is reset manually by opening the top of the J-T heater and pressing the reset button located in
the center of the heater block. See Figure 9-1 for the location of the reset button.
